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Solution Processing of Inorganic Materials 2008
DOI: 10.1002/9780470407790.ch6
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Spray CVD of Single‐Source Precursors for Chalcopyrite I–III–VI2 Thin‐Film Materials

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Cited by 4 publications
(6 citation statements)
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“…This approach was first reported in 1993 180. CIGS layers can be formed using the single‐source precursor by spray chemical vapour deposition (CVD) 181–183 and Figure 6 shows the SEM plane view and cross‐section images of spray CVD CuInS 2 deposited on Mo. Compared to spray pyrolysis deposited films, relatively large grains are observed in the plane view image and the cross‐section image shows columnar growth of CuInS 2 perpendicular to the substrate surface.…”
Section: Solution Processes For Cigs Depositionmentioning
confidence: 99%
See 1 more Smart Citation
“…This approach was first reported in 1993 180. CIGS layers can be formed using the single‐source precursor by spray chemical vapour deposition (CVD) 181–183 and Figure 6 shows the SEM plane view and cross‐section images of spray CVD CuInS 2 deposited on Mo. Compared to spray pyrolysis deposited films, relatively large grains are observed in the plane view image and the cross‐section image shows columnar growth of CuInS 2 perpendicular to the substrate surface.…”
Section: Solution Processes For Cigs Depositionmentioning
confidence: 99%
“…While potentially cleaner than spray pyrolysis, secondary ion mass spectrometry (SIMS) analysis of spray CVD CuInS 2 films still indicates that small amounts of O, C and P (0·4, 0·04, and 0·03 at.%, respectively) exist in the final product. Recently, CuInS 2 devices with 1·0% efficiency ( J sc = 12·5 mA/cm 2 , V oc = 0·309 V and fill factor = 37%) have been reported for this method 182.…”
Section: Solution Processes For Cigs Depositionmentioning
confidence: 99%
“…This method has been extensively reviewed, and when solvent evaporation occurs before contact with the surface, it can be referred to as spray chemical vapor deposition (CVD). 44 These spray growth methods are ideal for low-viscosity inks, which can be used to grow films that often do not require a subsequent high-temperature annealing step. However, controlled growth in this manner can require longer deposition times than a direct liquid coating approach.…”
Section: Coating Techniquesmentioning
confidence: 99%
“…When complete evaporation of solvents is achieved before the droplets contact the surface (especially in the case of volatile precursors), this method is called Spray CVD (chemical vapor deposition). [66,67] While the possibility to avoid subsequent hightemperature anneal is advantageous in these spray-growth methods (notably distinguished from spray coating), they require precise process control and generally longer deposition times than sequential direct liquid coating approaches. In addition, residual aerosols and/or vapors account for lower materials utilization and require enhanced safety and environmental precautions.…”
Section: Non-vacuum Deposition Methodsmentioning
confidence: 99%
“…Spray pyrolysis and Spray-CVD have been used for the deposition of CuInS 2 [65][66][67] as well as oxides that were later treated in chalcogen vapor to form CuInSe 2 . [68,69] Power conversion efficiencies of up to 5 % have been reported using this approach.…”
Section: Non-vacuum Deposition Methodsmentioning
confidence: 99%