2017
DOI: 10.1021/acsami.7b00139
|View full text |Cite
|
Sign up to set email alerts
|

Using Dopants to Tune Oxygen Vacancy Formation in Transition Metal Oxide Resistive Memory

Abstract: Introducing dopants is an important way to tailor and improve electronic properties of transition metal oxides used as high-k dielectric thin films and resistance switching layers in leading memory technologies, such as dynamic and resistive random access memory (ReRAM). TaO has recently received increasing interest because TaO-based ReRAM demonstrates high switching speed, long endurance, and low operating voltage. However, advances in optimizing device characteristics with dopants have been hindered by limit… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
28
0

Year Published

2018
2018
2023
2023

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 50 publications
(28 citation statements)
references
References 59 publications
(148 reference statements)
0
28
0
Order By: Relevance
“…A late trend towards the development of MO films with desirable electrical characteristics is the introduction of appropriate dopants that could affect the formation energy for the oxygen vacancies and thus allow tailoring the MO film electrical properties [10]. As an example, the introduction of Al in TiO 2 , that is one of the most celebrated MO, revealed improved switching characteristics in RRAMs [11], while it is theoretically predicted that Al could also act as "acceptor" type dopant enabling p-type conductivity [12].…”
Section: Introductionmentioning
confidence: 99%
“…A late trend towards the development of MO films with desirable electrical characteristics is the introduction of appropriate dopants that could affect the formation energy for the oxygen vacancies and thus allow tailoring the MO film electrical properties [10]. As an example, the introduction of Al in TiO 2 , that is one of the most celebrated MO, revealed improved switching characteristics in RRAMs [11], while it is theoretically predicted that Al could also act as "acceptor" type dopant enabling p-type conductivity [12].…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, the vacancies likely formed at the Chalcogenide-electrode interface during the repeatable writing of PCMs may cause the device failure at the high resistance state [188]. This issue can be effectively addressed by adding carbon dopants inside the Ge-Sb-Te media to circumvent the interfacial vacancies formation [187], [189]. Besides, the distance pitch between neighboring synapses in the whole networks is usually required to be very short to increase the density scale.…”
Section: Outlooksmentioning
confidence: 99%
“…Jiang et al systematically investigated the effects of various metal dopants on the formation of oxygen vacancy in amorphous as well as crystalline Ta 2 O 5 based on first principle, where the doping trend ought to normally valid for representative binary transition metal oxides. [132] In addition, Miao et al provided a HfO 2 -based ReRAM array achieving Boolean logic realized by a temporal programmable dimension. [133] They also designed 1bit full adder with implementation of logic functions, which offers absorbing scheme to construct logic-in memory systems.…”
Section: Metal Oxidementioning
confidence: 99%
“…For example, low‐temperature grown or solution‐processed TiO 2 , Al 2 O 3 thin film, as well as CeO x have been investigated. Jiang et al systematically investigated the effects of various metal dopants on the formation of oxygen vacancy in amorphous as well as crystalline Ta 2 O 5 based on first principle, where the doping trend ought to normally valid for representative binary transition metal oxides . In addition, Miao et al provided a HfO 2 ‐based ReRAM array achieving Boolean logic realized by a temporal programmable dimension .…”
Section: Resistive Switching Memorymentioning
confidence: 99%