Update on the Compact Synchrotron X-Ray Source Helios

Abstract

Helios is a compact superconducting Synchrotron X-ray source designed specifically for lithography. It will produce a total X-ray power of 8.2 kW when the design stored beam of 200 mA is achieved. The first phase of commissioning has just been completed in less than 2 months. A stored beam of 305 mA has been accumulated at the injection energy of 200 MeV and 55 mA has been accelerated to the full energy of 700 MeV.

Fabrication of 0.2 μm large scale integrated circuits using synchrotron radiation x-ray lithography

“…[1][2][3][4][5][6][7][8][9][10] The 512 kilobit static random access memory ͑SRAM͒ fabrication with 100% bit yield by IBM's group in 1993, for example, demonstrated that SR lithography was a viable candidate for sub-0.25 m device fabrication. 9 As the result of the development of SR rings, [11][12][13] x-ray steppers, 14 -18 high-quality x-ray masks, 19,20 and mask inspection 21 and repair 22 systems over the last decade, an infrastructure for SR lithography is now complete.…”