Universal characterization method for 3D tactile probing systems

Ferreira, N.M.; Krah, Thomas; Kniel, Karin; Büttgenbach, S.; Härtig, Frank

doi:10.1117/12.2011702

Cited by 5 publications

(9 citation statements)

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“…The transformation matrix contains non-diagonal elements, which is a consequence of the working principle. In previous characterization experiments [27], very little cross talk was observed and least squares fits revealed non-diagonal elements in % with values in the range of only 0.1 -4.5 % of the diagonal elements. In practice, however, measurements on the GMI do not differ whether diagonal elements are considered or not and all non-diagonal elements of % can be set to zero [22][23][24]26].…”

Section: Working Principlementioning

confidence: 75%

“…In this work, only the 90° orientation was investigated. In comparison with the previous version of this adapter [26,27], the external diameter was reduced from 16 mm to 10 mm to allow access to smaller structures, and its utilization was made more comfortable (screwing system).…”

Section: Electrical and Mechanical Interface Of The Microprobementioning

confidence: 99%

“…The microprobe was characterized by inducing deflections in its orthogonal directions , , in contact with a small reference cube (Figure 7) [20,27]. The characterization was made with a cubic artifact instead of a sphere, to avoid the slipping of the tip when the probe deflects in the axial and at the same time in a non-axial direction of the stylus.…”

Section: Determination Of the Conversion Matrixmentioning

confidence: 99%

“…This limitation is imposed because of the difficulty of using such a small stylus and not because of the machine accuracy. In order to extend the measurement capabilities of conventional CMMs towards micro-measurements, efforts for the integration of silicon-membrane-based microprobes into a CMM started five years ago at IMT and at PTB [24,26,27]. In order to improve the performance of this microprobe integrated into the CMM, an optimization of the assembly and integration process was developed and validated in this work.…”

Section: Introductionmentioning

confidence: 99%

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Integration of a piezoresistive microprobe into a commercial gear measuring instrument

Metz

Ferreira

Chaillot

et al. 2019

Precision Engineering

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Various microprobes have been developed in the last decade to address the needs of micrometrology. However, most microprobes are only employed in specialized measuring machines located in a few research institutes and are not widespread in the industry. This work aims to extend the capabilities of conventional coordinate measuring machines (CMMs) towards measuring microgeometries through the low-cost integration of a tactile microprobe. In order to demonstrate this, a gear measuring instrument (GMI), which is a commercial CMM not specialized for measurements at the microscale, has been equipped with a recently developed silicon-membrane-based microprobe. In the first part of this work, the working principle of the microprobe, its assembly and its integration into the GMI are described. Two different mounting setups of the microprobe onto the GMI were evaluated and tested. Measurements on the GMI were performed solely with the microprobe or by combining the microprobe and the measurement system already present on the GMI. This combination makes it possible to use the microprobe advantageously and to exchange it in a comfortable semi-automatic way. To test these two mounting setups, a new involute scanning artifact (SAFT) with superimposed waviness was measured.

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Section: Working Principlementioning

confidence: 75%

Section: Electrical and Mechanical Interface Of The Microprobementioning

confidence: 99%

Section: Determination Of the Conversion Matrixmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Integration of a piezoresistive microprobe into a commercial gear measuring instrument

Metz

Ferreira

Chaillot

et al. 2019

Precision Engineering

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“…The holder presented can easily be screwed onto a change plate [12] [13]. The change plate forms a standard interface between tactile probes and a coordinate measuring machine (CMM).…”

Section: Field Of Application: Gear Measurementsmentioning

confidence: 99%

3D micro probing systems for gear measurements with nanometer-scale deviation

Ferreira

Metz

Dietzel

et al. 2013

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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Three-dimensional micro probing systems based on silicon force sensors allow force measurements in the range of several µN. Their high sensitivity enables tactile measurements of three-dimensional micro-and nanostructures without leaving strong traces on the probed surfaces. However, their small sizes of 6.5 mm x 6.5 mm do not allow an easy handling and can lead to a breakage of the complete system rapidly. To improve the handling and the integration of these micro probing systems a new kind of probe head and an appropriate assembling method have been developed. In order to show the performance and the high reproducibility of microprobes for their use in coordinate metrology, many measurements have been carried out with a customary gear measuring instrument on a calibrated spur gear. The results have been compared to calibration values and the deviations are in the range of maximum some 100 nm.

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Probing-error compensation using 5 degree of freedom force/moment sensor for coordinate measuring machine

Cho

2013

Meas. Sci. Technol.

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A new probing and compensation method is proposed to improve the three-dimensional (3D) measuring accuracy of 3D shapes, including irregular surfaces. A new tactile coordinate measuring machine (CMM) probe with a five-degree of freedom (5-DOF) force/moment sensor using carbon fiber plates was developed. The proposed method efficiently removes the anisotropic sensitivity error and decreases the stylus deformation and the actual contact point estimation errors that are major error components of shape measurement using touch probes. The relationship between the measuring force and estimation accuracy of the actual contact point error and stylus deformation error are examined for practical use of the proposed method. The appropriate measuring force condition is presented for the precision measurement.

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Universal characterization method for 3D tactile probing systems

Cited by 5 publications

References 0 publications

Integration of a piezoresistive microprobe into a commercial gear measuring instrument

Integration of a piezoresistive microprobe into a commercial gear measuring instrument

3D micro probing systems for gear measurements with nanometer-scale deviation

Probing-error compensation using 5 degree of freedom force/moment sensor for coordinate measuring machine

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