3D micro probing systems for gear measurements with nanometer-scale deviation

Ferreira, N.M.; Metz, David; Dietzel, Andreas; Büttgenbach, S.; Krah, Thomas; Kniel, Karin; Härtig, Frank

doi:10.1109/3m-nano.2013.6737426

Cited by 7 publications

(5 citation statements)

References 8 publications

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“…To verify this solution, measurements were performed on calibrated reference objects and compared. Previous works on a silicon membrane-based microprobe have demonstrated the advantages and limitations of integrating such microprobes into CMMs [14,[33][34][35]. With the goal to facilitate this integration, a novel silicon microprobe based on a parallelogram design has been developed, presented [36,37] and patented [38].…”

Section: Integration Of An Isotropic Microprobe and A Microenvironmen...mentioning

confidence: 99%

Integration of an isotropic microprobe and a microenvironment into a conventional CMM

Metz

Jantzen

Wessel

et al. 2019

Meas. Sci. Technol.

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This paper describes the experimental verification of the novel IMT-PTB microprobe combined with a uniquely designed microenvironment. The microprobe consists of three silicon-based parallelograms stacked orthogonally, which leads to high isotropy. The probe tip deflections are detected in 3D with the help of piezoresistors placed in the parallelograms. The microenvironment facilitates and improves the measurement of workpieces with sub-millimeter features. The new microprobe and the microenvironment were integrated into a commercial coordinate measuring machine (CMM). To evaluate the microprobe performance, PTB produced and calibrated three reference objects: a cube, a sphere, and a microgear measurement standard. The differences between the calibration values and the measurement results obtained by the microprobe were in the sub-micrometer range. Furthermore, the microprobe was compared with the standard probing system of the gear measuring machine by measuring the reference objects with identical parameters. The results show the excellent performance of the micro probing system, thereby extending the capability of the CMM for high-precision measurements of complex workpieces at the microscale.

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Section: Integration Of An Isotropic Microprobe and A Microenvironmen...mentioning

confidence: 99%

Integration of an isotropic microprobe and a microenvironment into a conventional CMM

Metz

Jantzen

Wessel

et al. 2019

Meas. Sci. Technol.

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“…The other two bridges are under torsion, which induces no signal changes [22]. As a consequence of this working principle [20,22,23,26,30], the four measured voltages can be transformed into three theoretical main axis signals ′, ′, ′ with the help of the matrix (Eq. 1).…”

Section: Working Principlementioning

confidence: 99%

“…Capped 105 µm high vias in the PCB were employed as contact pads in order to reduce the diameter of the PCB to 8 mm (Figure 2, Step 3). Finally, the stylus is mounted onto the middle of the membrane with epoxy glue (353ND, Epothek) [30]. Styli with ruby spheres of diameters between 300 µm and 120 µm are commercially available.…”

Section: Fabrication and Assemblymentioning

confidence: 99%

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Integration of a piezoresistive microprobe into a commercial gear measuring instrument

Metz

Ferreira

Chaillot

et al. 2019

Precision Engineering

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Various microprobes have been developed in the last decade to address the needs of micrometrology. However, most microprobes are only employed in specialized measuring machines located in a few research institutes and are not widespread in the industry. This work aims to extend the capabilities of conventional coordinate measuring machines (CMMs) towards measuring microgeometries through the low-cost integration of a tactile microprobe. In order to demonstrate this, a gear measuring instrument (GMI), which is a commercial CMM not specialized for measurements at the microscale, has been equipped with a recently developed silicon-membrane-based microprobe. In the first part of this work, the working principle of the microprobe, its assembly and its integration into the GMI are described. Two different mounting setups of the microprobe onto the GMI were evaluated and tested. Measurements on the GMI were performed solely with the microprobe or by combining the microprobe and the measurement system already present on the GMI. This combination makes it possible to use the microprobe advantageously and to exchange it in a comfortable semi-automatic way. To test these two mounting setups, a new involute scanning artifact (SAFT) with superimposed waviness was measured.

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“…The expected probing forces are in the range of several millinewtons. The goal is the integration of enhanced microprobes into commercial coordinate measuring machines (CMMs) [11] and the development of a microenvironment for the improved handling of the samples. Figure 3 shows typical microscale measurement situations.…”

Section: Introductionmentioning

confidence: 99%

Microclamping principles from the perspective of micrometrology – A review

Jantzen

Stein

Kniel

et al. 2017

Precision Engineering

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This paper gives an overview of the field of clamping and gripping principles from the viewpoint of sample fixturing for dimensional metrology for microobjects. The requirements for clamping microcomponents that allow dimensional measurements are therefore explained before principles and solutions of microclamps as found in literature are reviewed and evaluated on basis of these requirements. Results show that there is no single superior clamping principle or method of implementation but rather several effective solutions for specific applications. The core value of this paper is the link between requirements for sample fixturing in dimensional micrometrology and the many approaches already investigated in the field of microclamping. A radar chart and a decision tree summarize and visualize the major aspects of this review. Finally, directions of future key research areas are suggested.

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3D micro probing systems for gear measurements with nanometer-scale deviation

Cited by 7 publications

References 8 publications

Integration of an isotropic microprobe and a microenvironment into a conventional CMM

Integration of an isotropic microprobe and a microenvironment into a conventional CMM

Integration of a piezoresistive microprobe into a commercial gear measuring instrument

Microclamping principles from the perspective of micrometrology – A review

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