2011
DOI: 10.1109/ted.2011.2128322
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Uniform High-Current Cathodes Using Massive Arrays of Si Field Emitters Individually Controlled by Vertical Si Ungated FETs—Part 1: Device Design and Simulation

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Cited by 24 publications
(12 citation statements)
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“…Field-emitter (FE) sources offer significant advantages over photocathode and thermionic sources due to their ability to be operated without the need for an aux-iliary laser system or a heating source. The demand for more efficient electron sources lead to the demand for cold cathode driven technologies, particularly FE sources [62]. FE cathodes also offer better portability as they typically do not require high vacuum pressures (< 1 × 10 −5 torr).…”
Section: Motivationmentioning
confidence: 99%
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“…Field-emitter (FE) sources offer significant advantages over photocathode and thermionic sources due to their ability to be operated without the need for an aux-iliary laser system or a heating source. The demand for more efficient electron sources lead to the demand for cold cathode driven technologies, particularly FE sources [62]. FE cathodes also offer better portability as they typically do not require high vacuum pressures (< 1 × 10 −5 torr).…”
Section: Motivationmentioning
confidence: 99%
“…Field-emitter arrays (FEA) are fabricated by arranging FEs in an orderly fashion as large arrays, thus can provide high average [66] and uniform currents making them ideal for most applications, e.g. in feild emission displays (FEDs) [58,62]. Diamond FEAs, in particular, have applications in FELs as they are rugged and generate little heat [67,68].…”
Section: Motivationmentioning
confidence: 99%
“…[3][4][5][6] Such devices have been studied in a wide range of applications such as displays, 2,7,8) microwave waveguides, 9,10) free electron lasers, 11) electron microscopes, 12,13) vacuum gages, photo sensors, [14][15][16][17][18] and reliable uniform and high current emissions. 19,20) The present study focuses on magnetic sensors using features of vacuum microelectronics devices, particularly those with separate electrodes. 21) At first, magnetic sensors, wherein the transport of carriers in the semiconductor is exploited, were studied to meet size-reduction requirements.…”
Section: Introductionmentioning
confidence: 99%
“…First, scalable processes for creating highly uniform field emitter arrays have already been studied for the case of DC emission in silicon. Furthermore, silicon does not require highly stringent vacuum conditions for use as a field emitter (see for example the degradation of tungsten tips over time during photoemission as in ).…”
Section: Introductionmentioning
confidence: 99%