Stability of cross-shaped electron beam in a vacuum magnetic sensor with a p-Si field emitter tip

Uemura, Kentaro; Suemasu, Takashi

doi:10.1016/j.vacuum.2019.108858

Cited by 2 publications

(1 citation statement)

References 40 publications

(38 reference statements)

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“…Silicon tips have been adopted extensively to develop atomic force microscopy probes, field emitters, and microneedles. [3][4][5][6] In the early development, AFM probes were fabricated by hand. Later, the silicon-based micromachined AFM tips emerged as a powerful technology to overcome poor reproducibility and to meet the increased demand for smaller-dimensioned probes.…”

Section: Introductionmentioning

confidence: 99%

A Simple Method for Fabrication of Self‐sharpened Silicon Tips for Atomic Force Microscopy Applications

Rudrappa

Venkatramana

Ahmed

et al. 2022

Crystal Research and Technology

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A simple and high yield method is presented for the bulk generation of atomic force microscopy (AFM) probes with self‐sharpened silicon tips. The experimental setup includes a controlled chemical etching environment at a constant temperature with continuous recirculation and filtration. A KOH solution is considered cost‐effective as the etchant and stabilized to the required concentration (55%, v/v) and temperature (40 °C), so as to provide an etch rate of 40 nm min−1 and yield a smooth etch profile. A high density of silicon tips is fabricated, with yield up to 90%, and a consistent tip radius of ≈12.73 ± 1.51 nm. These tips can be successfully integrated with AFM cantilevers, resulting in AFM probes. Further, such AFM‐probes are well characterized using laser Doppler vibrometry and scanning electron microscopy. The result shows a resonance frequency of 1.2–1.4 MHz and a high‐quality factor of ≈708.8. In addition, the AFM probes produced images are comparable in quality to those obtained from commercially available probes.

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Section: Introductionmentioning

confidence: 99%