Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

Toy, M. Fatih; Ferhanoğlu, Onur; Torun, Hamdi; Ürey, Hakan

doi:10.1016/j.sna.2009.02.010

Cited by 31 publications

(24 citation statements)

References 11 publications

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“…A system or thermal imagery has not been reported. From 2005 to 2009 a group from the University Koç, Turkey presented some thermomechanical IR sensor developments [120][121][122]. The work focused on a specific cantilever design and compound.…”

Section: Other Notable Research Groupsmentioning

confidence: 99%

Microthermomechanical infrared sensors

Steffanson

Rangelow

2014

Opto-Electronics Review

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We present a state-of-the-art overview of microthermomechanical infrared sensor technology. The working principle of this sensor is based on a bi-material actuated micromechanical deflection, generated by an induced temperature rise due to incident infrared radiation absorption. In order to generate a thermal image the thermomechanical deflections of the freestanding microstructures are read by either capacitive, piezoresistive or optical means. Research and development activities in this field began in the early 1990s. The development of this technology within the last 20 years has resulted in innovations such as uncooled multiband infrared detection, high-speed infrared sensing and uncooled THz imaging. This paper outlines representative milestones of this technology and analyses important results of notable groups. Significant activities on capacitive and optical readout techniques of thermomechanical infrared arrays are presented. Furthermore the advantages of microthermomechanical infrared sensors over current well-established uncooled infrared technologies are summarized. In conclusion the latest developments of this technology offer a highly potential solution for a variety of important energy-saving, safety and security applications.

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Section: Other Notable Research Groupsmentioning

confidence: 99%

Microthermomechanical infrared sensors

Steffanson

Rangelow

2014

Opto-Electronics Review

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“…Diffraction grating interferometer based readout method has been used with thermal detectors [4]. Theoretical findings reveal that there is further room for improving the performance of these detectors [4,5].…”

Section: Optical Readout Systems For Thermal Imagingmentioning

confidence: 99%

“…Theoretical findings reveal that there is further room for improving the performance of these detectors [4,5]. We focus on two different optical setups to improve the performance of the detectors: a 4-f imaging setup and a converging beam optical setup.…”

Section: Optical Readout Systems For Thermal Imagingmentioning

confidence: 99%

Diffraction grating-based optical readout for thermal imaging

et al. 2012

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C 0.6 Ñ t, 0.4 E O Z 0.2 0 0 02 0.4 06 08 Ratio of gap to the wavelength go-)J8 Initial Gap (go) + gA/8ABSTRACT The thermal sensor system presented in this paper is based on the mechanical bending due to the incident IR radiation. A diffraction grating is embedded under each pixel to facilitate optical readout. Typically the first diffraction order is used to monitor the sub-micron mechanical displacement with sub-nanometer precision. In this work; two different optical readout systems based on diffraction gratings are analyzed.First setup employs a conventional 4f optical system. In this one-to-one imaging system, collimated light is propagated through a lens, filtered with an aperture and then imaged onto a CCD by a second lens.Second system is more compact to improve image quality and to reduce noise. This is achieved by using an off-axis converging laser beam illumination that forms the Fourier plane near the imaging lens. This approach has important advantages such as reducing number of optical components and minimizing the optical path. The system was optimized considering parameters such as laser converging angle, laser beam size at MEMS chip, and magnification of the imaging system.

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“…Similar methods have been used in thermo-mechanical IR sensors having an optical air cavity with a suitable depth underneath the bimaterial membrane or cantilevers. (12) SiN films are known as IR-absorbing films and frequently used in the thermo-mechanical IR sensors; however, a high IR absorptance cannot be obtained without the optical air cavity underneath sensor structures, and cannot be realized in our proposed crystalline PZT film pyroelectric sensors formed on a γ-Al 2 O 3 /Si substrate. Therefore, an investigation of multilayer-stack IR absorbers that can be easily deposited on sensor structures is desired.…”

Section: Introductionmentioning

confidence: 99%

SiO2/SiN Multilayer-Stack Infrared Absorber Integrated on Pb(Zr0.4,Ti0.6)O3 Film Pyroelectric Sensors on γ-Al2O3/Si Substrate

2015

Sensors and Materials

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In this study, Pb(Zr 0.4 ,Ti 0.6 )O 3 (PZT) film pyroelectric infrared sensors were fabricated on a Si substrate with a SiO 2 /SiN multilayer-stack infrared (IR) absorber and characterized. Since an IR absorber is a critical element that determines the sensitivity of IR sensors, we have proposed a multilayer-stack IR absorber based on complementary metal-oxide-semiconductor (CMOS) compatible materials for the PZT film pyroelectric sensor. We designed and fabricated a SiO 2 /SiN multilayer-stack IR absorber that possesses a broad and high IR absorptance in the wavelength range from 8 to 14 μm. The thicknesses of the SiO 2 and SiN films were designed as 550 and 850 nm, respectively, according to the calculation result of absorptance in the multilayer films. The SiO 2 /SiN multilayer-stack absorber was integrated on PZT film sensors by plasmaenhanced chemical vapor deposition, and 86% average IR absorptance was obtained in the wavelength range from 8 to 14 μm. A specific detectivity of 1.15 × 10 7 cmHz 0.5 /W was achieved at 30 Hz on the PZT film pyroelectric sensor.

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Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

Cited by 31 publications

References 11 publications

Microthermomechanical infrared sensors

Microthermomechanical infrared sensors

Diffraction grating-based optical readout for thermal imaging

SiO2/SiN Multilayer-Stack Infrared Absorber Integrated on Pb(Zr0.4,Ti0.6)O3 Film Pyroelectric Sensors on γ-Al2O3/Si Substrate

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Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing

Cited by 31 publications

References 11 publications

Microthermomechanical infrared sensors

Microthermomechanical infrared sensors

Diffraction grating-based optical readout for thermal imaging

SiO2/SiN Multilayer-Stack Infrared Absorber Integrated on Pb(Zr0.4,Ti0.6)O3 Film Pyroelectric Sensors on &gamma;-Al2O3/Si Substrate

Contact Info

Product

Resources

About

SiO2/SiN Multilayer-Stack Infrared Absorber Integrated on Pb(Zr0.4,Ti0.6)O3 Film Pyroelectric Sensors on γ-Al2O3/Si Substrate