2009
DOI: 10.1260/175095409788922293
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Uncertainty analysis for dynamic properties of MEMS resonator supported by fuzzy arithmetics

Abstract: In the paper the application of uncertainty analysis performed for microelectromechanical resonator is presented. Main objective of undertaken analysis is to assess the propagation of considered uncertainties in the variation of chosen dynamic characteristics of Finite Element model of microresonator. Many different model parameters have been assumed to be uncertain: geometry and material properties. Apart from total uncertainty propagation, sensitivity analysis has been carried out to study separate influence… Show more

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Cited by 6 publications
(3 citation statements)
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“…It is worth noticing that, in a broader view, SMA are willingly used to modify the properties of the host structures [36]. On the other hand, the involved complex fluid flow and fluid-structure interaction related phenomena need the researchers' particular attention to be correctly and efficiently addressed to enable the enhancement of the dynamic properties for various types of structural components [37][38][39][40].…”
Section: Introductionmentioning
confidence: 99%
“…It is worth noticing that, in a broader view, SMA are willingly used to modify the properties of the host structures [36]. On the other hand, the involved complex fluid flow and fluid-structure interaction related phenomena need the researchers' particular attention to be correctly and efficiently addressed to enable the enhancement of the dynamic properties for various types of structural components [37][38][39][40].…”
Section: Introductionmentioning
confidence: 99%
“…Most of these modifications are essentially implemented to withstand the pull-in instability but in most cases, these revisited designs complicate their fabrication processes and cost, create residual stress, and therefore may reduce the overall system reliability [23]. Furthermore, the existence of uncertainty in the fabrication and characterization of MEM devices in addition to the presence of noise/disturbance represent major contributors in reducing the performance of such micro-sized devices [26].…”
Section: Introductionmentioning
confidence: 99%
“…Widely used different MEMS devices also require many tests to be performed to elaborate designs with desired properties [5,12,13]. As it is of common engineering practice, the procedures of virtual prototyping, including finite element (FE) analyses, are carried out to investigate static and dynamic properties of microdevices.…”
Section: Introductionmentioning
confidence: 99%