Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI 2021
DOI: 10.1117/12.2584178
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Ultrafast laser machining: process optimization and applications

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Cited by 19 publications
(37 citation statements)
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“…An almost identical behavior was observed for a 2 ps pulse duration but with higher ablated volumes due to the usage of shorter pulses [ 19 ]. Similar results with even higher energy specific volumes have been reported for 300 fs and 350 fs pulse duration in the near infrared (NIR) [ 23 , 60 ]. In contrast to the rest of the literature, in [ 24 ], a significant drop by a factor of two of the maximum energy specific volume for steel (from about 0.4 mm 3 /min/W for single pulses down to less than 0.2 mm 3 /min/W, Figure 8 a, blue empty squares) for a triple pulse burst was reported for a 210 fs pulse duration for a wavelength of 1030 nm.…”
Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalssupporting
confidence: 87%
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“…An almost identical behavior was observed for a 2 ps pulse duration but with higher ablated volumes due to the usage of shorter pulses [ 19 ]. Similar results with even higher energy specific volumes have been reported for 300 fs and 350 fs pulse duration in the near infrared (NIR) [ 23 , 60 ]. In contrast to the rest of the literature, in [ 24 ], a significant drop by a factor of two of the maximum energy specific volume for steel (from about 0.4 mm 3 /min/W for single pulses down to less than 0.2 mm 3 /min/W, Figure 8 a, blue empty squares) for a triple pulse burst was reported for a 210 fs pulse duration for a wavelength of 1030 nm.…”
Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalssupporting
confidence: 87%
“…The most important measure to distinguish between the ultra-short pulse regime and classical thermal heating in equilibrium is the electron–phonon coupling time , which is a characteristic time for heating the ionic lattice. In first approximation, this value is a constant, but, in principle, it depends on the deposited energy, and the time of relaxation can be multiples of that characteristic time [ 23 ]. It can be estimated by , with being the heat capacity of the ionic system and being the electron-phonon coupling constant [ 37 ].…”
Section: Physics Of Ultra-short Burst Pulse Ablation Of Metalsmentioning
confidence: 99%
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