Ultra Low-Loss Silicon Waveguides for 200 mm Photonics Platform

Wilmart, Quentin; Ribaud, Karen; Grosse, Philippe; Charbonnier, B.; Bernabé, Stéphane; Sciancalepore, Corrado; Pargon, E.; Szelag, Bertrand; Bellegarde, Cyril; Petit-Etienne, C.; Youssef, Laurène; Hartmann, Jean‐Michel; Fowler, Daivid; Brision, S.; Garcia, Stephanie; Myko, A.

doi:10.1109/group4.2019.8925610

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Cited by 5 publications

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“…Another route is to smooth out the sidewalls using H2 thermal annealing. Previous studies have shown a strong reduction of Si waveguide roughness, down to sub-nanometer values [19]- [21]. Such a method showed a significant propagation loss improvement for standalone waveguides.…”

Section: Introductionmentioning

confidence: 88%

A Complete Si Photonics Platform Embedding Ultra-Low Loss Waveguides for O- and C-Band

Wilmart

Brision

Hartmann

et al. 2021

J. Lightwave Technol.

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We report ultra-low propagation losses in silicon submicrometric waveguides on a 200 mm CMOS compatible photonics platform. We show losses in C-band (O-band) as low as 0.1 dB/cm and 0.7dB/cm (0.14dB/cm and 1.1dB/cm) in monomode rib and strip waveguide geometries, respectively, thanks to a H2 smoothing annealing. In addition to optical losses down to unprecedented levels in silicon waveguides, we show that the performance characteristics of the main passive and active building blocks of the photonics platform are preserved or even improved by the smoothing process.

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Section: Introductionmentioning

confidence: 88%