We report ultra-low propagation losses in silicon submicrometric waveguides on a 200 mm CMOS compatible photonics platform. We show losses in C-band (O-band) as low as 0.1 dB/cm and 0.7dB/cm (0.14dB/cm and 1.1dB/cm) in monomode rib and strip waveguide geometries, respectively, thanks to a H2 smoothing annealing. In addition to optical losses down to unprecedented levels in silicon waveguides, we show that the performance characteristics of the main passive and active building blocks of the photonics platform are preserved or even improved by the smoothing process.
Recent advances on hybrid III-V silicon photonic integrated circuits using a wafer bonding technique are reported, with particular attention on the wavelength division multiplexing transmitters integrating distributed feedback lasers and semiconductor optical amplifiers.
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