A Complete Si Photonics Platform Embedding Ultra-Low Loss Waveguides for O- and C-Band

Wilmart, Quentin; Brision, S.; Hartmann, Jean‐Michel; Myko, A.; Ribaud, Karen; Petit-Etienne, C.; Youssef, Laurène; Fowler, Daivid; Charbonnier, B.; Sciancalepore, Corrado; Pargon, E.; Bernabé, Stéphane

doi:10.1109/jlt.2020.3030123

Cited by 21 publications

(19 citation statements)

References 28 publications

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Section: Discussionmentioning

confidence: 99%

“…Besides, the present silicon photonic delayline is the longest (as long as 100 cm) and has the lowest propagation loss of ≈0.1 dB cm −1 for uniform strip SOI photonic waveguide (see Section S9, Supporting Information). [18,24,[52][53][54][55][56][57][58] As a summary, it can be seen that these silicon photonic devices have exhibited very excellent performances enabled by broadening the core-regions to be beyond the singlemode regime, in which way the propagation loss of the fundamental mode is reduced very significantly. Meanwhile, the silicon photonic devices beyond the singlemode regime can be compact by introducing Euler MWBs.…”

Section: Discussionmentioning

confidence: 99%

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Ultralow‐Loss Silicon Photonics beyond the Singlemode Regime

Zhang

Hong

Wáng

et al. 2022

Laser & Photonics Reviews

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Silicon photonics beyond the singlemode regime is applied for enabling ultralow-loss waveguide propagation for the fundamental mode even without any special fabrication process. Here a micro-racetrack resonator is fabricated with a standard 220-nm-SOI (silicon-on-insulator) multiproject-wafer foundry and shows a record high intrinsic quality factor of 1.02×10 7 , corresponding to an ultralow propagation loss of only 0.065 dB cm −1 , which is about 20 times less than that of regular 450-nm-wide waveguides on the same chip. A state-of-the-art microwave photonic filter on silicon is then realized with an ultranarrow 3-dB bandwidth of 20.6 MHz and a tuning range of ≈20 GHz for the first time. A 100-cm-long delayline employed the broadened waveguides is also demonstrated with compact 90°Euler-curve bends, and the measured average propagation loss is about 0.14 dB cm −1 . The concept of silicon photonics beyond the singlemode regime helps solve the issue of high propagation loss significantly. In particular, it enables silicon photonic devices with enhanced performances, which paves the way for realizing large-scale silicon photonic integration. This concept can be extended further to any other material platforms, such as silicon nitride and lithium niobate. This also brings numerous new opportunities for various applications such as nonlinear photonics, large-scale photonic integration, quantum photonics, microwave photonics, etc.

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Section: Discussionmentioning

confidence: 99%

Section: Discussionmentioning

confidence: 99%

Ultralow‐Loss Silicon Photonics beyond the Singlemode Regime

Zhang

Hong

Wáng

et al. 2022

Laser & Photonics Reviews

View full text Add to dashboard Cite

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“…The highest Q factors of these resonators 37 are usually limited to around 10 5 . Further fabrication processes can be used to reduce the losses of the single-mode waveguides 38 – 41 . Using wider, multimode, waveguides offer smaller propagation losses for the fundamental modes because of the reduced modal overlap with the sidewall roughness.…”

Section: Introductionmentioning

confidence: 99%

Broadband high-Q multimode silicon concentric racetrack resonators for widely tunable Raman lasers

et al. 2022

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Multimode silicon resonators with ultralow propagation losses for ultrahigh quality (Q) factors have been attracting attention recently. However, conventional multimode silicon resonators only have high Q factors at certain wavelengths because the Q factors are reduced at wavelengths where fundamental modes and higher-order modes are both near resonances. Here, by implementing a broadband pulley directional coupler and concentric racetracks, we present a broadband high-Q multimode silicon resonator with average loaded Q factors of 1.4 × 106 over a wavelength range of 440 nm (1240–1680 nm). The mutual coupling between the two multimode racetracks can lead to two supermodes that mitigate the reduction in Q factors caused by the mode coupling of the higher-order modes. Based on the broadband high-Q multimode resonator, we experimentally demonstrated a broadly tunable Raman silicon laser with over 516 nm wavelength tuning range (1325–1841 nm), a threshold power of (0.4 ± 0.1) mW and a slope efficiency of (8.5 ± 1.5) % at 25 V reverse bias.

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“…Due to the high upfront investment for CMOS manufacturing infrastructure, most silicon photonic design groups have relied on open-access foundries for the fabrication of their chips. This has initiated a series of open-access foundries such as AIM Photonics [18], AMF [19], CORNERSTONE [20], CEA-LETI [21], CompoundTek, VTT [22] and LIGENTEC [23]. A more comprehensive list of open-access foundries can be found in [17], [24].…”

Section: Introductionmentioning

confidence: 99%

Wafer-Scale Demonstration of Low-Loss (∼0.43 dB/cm), High-Bandwidth (>38 GHz), Silicon Photonics Platform Operating at the C-Band

Sia¹,

Wang

et al. 2022

IEEE Photonics J.

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The key advantage of silicon photonics comes from its potential for large scale integration, in a low-cost and scalable fashion. This has sustained the growth in the area despite disadvantages such as the lack of a monolithic light source, or the absence of a second order non-linear response (χ (2) ). Thus far, the work in the field has focused on reporting individual devices from a single die, with excellent performances. Wafer-level results, an area which has not been addressed sufficiently, is a critical aspect of silicon photonics and will provide the community with information regarding scalability and variation, which will be the key differentiating advantage of silicon photonics over other photonic platforms. In this work, we report the development of a low-loss, high-bandwidth C-band silicon photonic platform on a 200 mm CMOS-compatible process line, demonstrating wafer-level performance in the process. Ultra-low waveguide propagation loss with median values as low as 0.43 dB/cm has been achieved. Silicon Mach-Zehnder and microring modulators with median bandwidth of 38.5 and 43 GHz respectively are presented. Finally, germanium waveguide-integrated photodetectors with median bandwidth of 43 GHz are reported. The results reported in this work are comparable to prior demonstrations concerning individual devices. The baseline designs on this platform presented in this work can be accessed commercially from CompoundTek.

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A Complete Si Photonics Platform Embedding Ultra-Low Loss Waveguides for O- and C-Band

Cited by 21 publications

References 28 publications

Ultralow‐Loss Silicon Photonics beyond the Singlemode Regime

Ultralow‐Loss Silicon Photonics beyond the Singlemode Regime

Broadband high-Q multimode silicon concentric racetrack resonators for widely tunable Raman lasers

Wafer-Scale Demonstration of Low-Loss (∼0.43 dB/cm), High-Bandwidth (>38 GHz), Silicon Photonics Platform Operating at the C-Band

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