Ultra-high density carbon nanotubes on Al-Cu for advanced vias

Improved RF Isolation Using Carbon Nanotube Fence-Wall for 3-D Integrated Circuits and Packaging

“…Its ballistic transport properties, high current density, thermal conductivity [8], mechanical strength [9], high aspect structure has attracted the attention of both the scientific and technological community. These include applications in interconnects [10], [11] and heat extraction [12]. With its renowned properties, CNTs recently opened doors to applications in the microwave domain.…”

Efficient Coupling of Optical Energy for Rapid Catalyzed Nanomaterial Growth: High-Quality Carbon Nanotube Synthesis at Low Substrate Temperatures

“…Selective growth of multiwall carbon nanotubes (MWCNTs) in vias has been previously demonstrated using conventional CVD or plasma-assisted CVD methods in the temperature range of 390-700 o C. 1,13,14 However, CNTs growth in the lower temperature range of 390-550 o C tends to result in a higher concentration of structural defects 13,15 which in turn, introduce more scattering centers. In addition, the growth rate of nanotubes on metal (conductive) substrates in the lower temperature range is typically very low (0.05 -0.16 μm/min) 16 .…”

In-situ study of growth of carbon nanotube forests on conductive CoSi2 support

“…This application requires the CNTs to be grown by chemical vapor deposition (CVD) in very high density vertically-aligned forests. [4][5][6][7][8][9][10][11] There has been great progress in growing such forests on insulating substrates such as Al 2 O 3 or SiO 2 (Refs. [12][13][14][15][16][17][18][19][20][21].…”