Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer

Abstract

We demonstrate a 32 × 32 path-independent-insertion-loss optical path switch that integrates 1024 thermooptic Mach-Zehnder switches and 961 intersections on a small, 11 × 25 mm2 die. The switch is fabricated on a 300-mm-diameter silicon-on-insulator wafer by a complementary metal-oxide semiconductor-compatible process with advanced ArF immersion lithography. For reliable electrical packaging, the switch chip is flip-chip bonded to a ceramic interposer that arranges the electrodes in a 0.5-mm pitch land grid array. The on-chip loss is measured to be 15.8 ± 1.0 dB, and successful switching is demonstrated for digital-coherent 43-Gb/s QPSK signals. The total crosstalk of the switch is estimated to be less than -20 dB at the center wavelength of 1545 nm. The bandwidth narrowing caused by dimensional errors that arise during fabrication is discussed.

Optical Networking Paradigm: Past, Recent Trends and Future Directions

“…Recently, an ultra-compact 32 × 32 strictly-nonblocking Si-wire optical switch packaged with a land grid array (LGA) interposer has been developed by National Institute of Advanced Industrial Science and Technology (AIST) [77]. The optical switch integrates 1024 thermooptic Mach-Zehnder (MZ) switches and 961 intersections on a very small, 11 × 25 mm 2 die.…”

Optical network technologies for HPC: computer-architects point of view

“…However, FMS technologies have thus far suffered from either severely limited port count, lack of long-term reliability, or high cost. Recently, an extremely small footprint 32 Â 32 FMS has been realized by silicon photonics [36], which allows to compose a large scale switch fabrics at low cost. One possible future direction is to optimize a hybrid use of WSS and FMS for the necessary bandwidth scaling required in the post-Moore era.…”

Compact and low-loss liquid crystal loaded Mach-Zehnder optical switch based on Si wire waveguide

“…In Si PICs, phase control is a key function for the realization of various important devices such as optical switches, modulators, variable wavelength filters, and coherent receivers [1,2,3,4,5]. It would also be a practical solution for compensating the parasitic phase-shifts stemming from structural size errors in fabricated Si photonic devices [6,7].…”

“…The integration of heaters on Si waveguides is one of the major phase control techniques owing to the relatively large thermo-optic (TO) effect of silicon [2,5].…”