Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology

Wu, Shishan; Zhao, Zhan; Guo, Li; Du, Lidong; Xiao, Li; Fang, Zhen; Zhao, Jianguo; Xuan, Yun Dong

doi:10.4028/www.scientific.net/kem.503.324

Cited by 3 publications

(3 citation statements)

References 2 publications

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“…The parameters of the MPP are shown in Table 1. They are calculated according to related theory [5]. The optimum side length of the membrane is analyzed by ANSYS software as well.…”

Section: Figure 1 Sketch Map Of Noise Scavengermentioning

confidence: 99%

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Acoustic Noise Energy Scavenger with Noise Reduction Effect

Ping

et al. 2014

KEM

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A kind of novel acoustic noise energy scavenger with additional function of noise reduction is introduced in this article. The device consists of energy harvesting membranes and silicon micro perforated panel (MPP) resonant structure. Both of them are all fabricated with silicon wafer in use of MEMS technology. The maximum output power of the energy scavenger is about 14.1μW/m2, the maximum open circuit voltage achieves 69.41mV, and the average noise absorption coefficient of the device is higher than 0.7 in the bandwidth of 1500Hz to 6000Hz. The energy collected by the device could be used for driving micro and nano electronic systems.

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“…The parameters of the MPP are shown in Table 1. They are calculated according to related theory [5]. The optimum side length of the membrane is analyzed by ANSYS software as well.…”

Section: Figure 1 Sketch Map Of Noise Scavengermentioning

confidence: 99%

“…Table 2 Side length a m =1mm a m =2mm a m =3mm a m =4mm Deflection 0.00262µm 0.0174µm 0.0447µm 0.0836µm The MPP and piezoelectric membrane array panel are all fabricated by MEMS technology [5]. Because the critical thin membrane which is of a thickness only about 2um is hard to make by traditional method.…”

Section: Figure 1 Sketch Map Of Noise Scavengermentioning

confidence: 99%

Acoustic Noise Energy Scavenger with Noise Reduction Effect

Ping

et al. 2014

KEM

Self Cite

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“…The prospective potential for accurate production of ultra-micro perforations is the main reason for the use of MEMS process to fabricate the ultra-MPPs. Wu S-H [15] has applied MEMS technology to manufacture MPPs with perforations of 100 um in diameter, while no further research is carried on the ultra-MPPs with perforations of diameter less than 100 um. Recently, Qian Y-J [16] has investigated on ultra-MPPs using MEMS technology, however, the technology process has't been enunciated.…”

Section: Introductionmentioning

confidence: 99%

Development of Broadband Ultra Micro-Perforated Panels Based on MEMS Technology

Cui

Liu

et al. 2014

AMM

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Fabrication process of ultra micro-perforated panels (ultra-MPPs) with perforations of diameter below 100 um based on MEMS technology is expatiated in this paper. As a promising alternative to the conventional porous absorbing materials, MPP absorber is now being widely used in noise control engineering. Theory reveals that the maximum sound absorption bandwidth of a single MPP absorber could be achieved by reducing the perforation diameter to a certain limit and the desirable perforation diameters are less than 100um under many circumstances. However, due to the limitation of traditional manufacturing tools and techniques, MPPs with ultra-micro perforations of diameter less than 100um, namely for ultra micro-perforated panel (ultra-MPPs), have seldom been investigated yet. In this study, micro electro mechanical systems (MEMS) technology was applied to a trial production of ultra-MPPs and the measurement of their normal absorption coefficients were carried out in the impedance tube. Results show that ultra-MPPs could attain high absorption over a broad frequency range, indicating that as a micro machining process, MEMS technology is suitable for fabricating ultra-MPPs in order to ensure the absorption performance.

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Investigation on Minute Holes of Woven Fabrics for Wide-Band Micro-Perforated Sound Absorbers

et al. 2023

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Woven fabric perforation is helpful to be adopted to meet the microstructure requirement of a micro-perforated panel (MPP) absorber. Unlike conventional MPP, the woven fabric micro-perforations are formed by yarn in the x (weft) and y (warp)-directions. Hence, minute holes of the MPP with a diameter of 0.1–0.3 mm or a high perforation ratio are expected to be easily fabricated, while such a specification is difficult to realize on a solid surface, as found in some studies. The study presented here focuses on the use of minute holes in MPP absorbers by woven fabrics and discusses the minute hole properties of woven fabrics and their associated absorption characteristics. Theoretical results by Maa’s model are also used to validate resulting characteristics found from the experimental investigations. It is found that minute holes with around 0.10–0.20 mm diameter have been successfully fabricated by controlling weft yarn density. The woven fabrics are capable of producing half-absorption bandwidth of up to 5000 Hz (>3 octaves), while the peak of the absorption coefficient can be more than 0.8. In addition, varying hole diameter with the order of 10−2 mm can change the absorption behavior for both peak absorption and absorption bandwidth. Such behavior is confirmed by comparing the results with the theoretical model. This study also indicates that Maa’s model is still applicable for predicting absorption of MPP developed based on woven fabric material.

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Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology

Cited by 3 publications

References 2 publications

Acoustic Noise Energy Scavenger with Noise Reduction Effect

Acoustic Noise Energy Scavenger with Noise Reduction Effect

Development of Broadband Ultra Micro-Perforated Panels Based on MEMS Technology

Investigation on Minute Holes of Woven Fabrics for Wide-Band Micro-Perforated Sound Absorbers

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