Micro-perforated panel (MPP) is known for its remarkable noise absorption capability and has been studied and developed for decades. Although the panel and cavity walls of traditional MPP are rigid, some previous works have shown that the absorption bandwidth of flexible MPP can be improved by the vibration of the panel. But this result is only tested at low frequencies. In this paper, the flexible MPP aiming at high frequency range is studied under a control experiment. But the perforations of high frequency MPP are in the range of micron and difficult to be fabricated in traditional mechanical methods. A new process, based on MEMS silicon mold technology and PDMS casting method, is developed to meet this challenge. Experimental results show that the noise absorption bandwidth of flexible MPP does get widened conspicuously only at a little sacrifice of absorption peak.
A kind of novel acoustic noise energy scavenger with additional function of noise reduction is introduced in this article. The device consists of energy harvesting membranes and silicon micro perforated panel (MPP) resonant structure. Both of them are all fabricated with silicon wafer in use of MEMS technology. The maximum output power of the energy scavenger is about 14.1μW/m2, the maximum open circuit voltage achieves 69.41mV, and the average noise absorption coefficient of the device is higher than 0.7 in the bandwidth of 1500Hz to 6000Hz. The energy collected by the device could be used for driving micro and nano electronic systems.
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