Two-dimensional fluid approach to the dc magnetron discharge

Costin, C.; Marques, L.; Popa, G.; Gousset, G.

doi:10.1088/0963-0252/14/1/018

Cited by 56 publications

(55 citation statements)

References 53 publications

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“…The conventional magnetron sputtering discharge has been successfully modeled by a 2D fluid model of the dc discharge 228,229 and by self-consistent particle-in-cell (PIC)/ Monte Carlo collisional simulations of the dc (Refs. [230][231][232][233][234] and the rf (Refs.…”

Section: Physics Of Hipimsmentioning

confidence: 99%

High power impulse magnetron sputtering discharge

Guðmundsson¹,

Brenning²,

Lundin³

et al. 2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

623

446

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The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron target in unipolar pulses at low duty cycle and low repetition frequency while keeping the average power about 2 orders of magnitude lower than the peak power. This results in a high plasma density, and high ionization fraction of the sputtered vapor, which allows better control of the film growth by controlling the energy and direction of the deposition species. This is a significant advantage over conventional dc magnetron sputtering where the sputtered vapor consists mainly of neutral species. The HiPIMS discharge is now an established ionized physical vapor deposition technique, which is easily scalable and has been successfully introduced into various industrial applications. The authors give an overview of the development of the HiPIMS discharge, and the underlying mechanisms that dictate the discharge properties. First, an introduction to the magnetron sputtering discharge and its various configurations and modifications is given. Then the development and properties of the high power pulsed power supply are discussed, followed by an overview of the measured plasma parameters in the HiPIMS discharge, the electron energy and density, the ion energy, ion flux and plasma composition, and a discussion on the deposition rate. Finally, some of the models that have been developed to gain understanding of the discharge processes are reviewed, including the phenomenological material pathway model, and the ionization region model.

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Section: Physics Of Hipimsmentioning

confidence: 99%

High power impulse magnetron sputtering discharge

Guðmundsson¹,

Brenning²,

Lundin³

et al. 2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

623

446

View full text Add to dashboard Cite

show abstract

“…Following the procedure described in Ref. [33], the boundary conditions at With the zero thermal flux at the discharge walls usually considered [28,32,34], the boundary condition for the electron energy flux at the walls …”

Section: Charged Particle Descriptionmentioning

confidence: 99%

Magnetic filter operation in hydrogen plasmas

Kolev

Lishev

Shivarova

et al. 2007

Plasma Phys. Control. Fusion

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Abstract. Fluid-plasma model description of the operation of a magnetic filter for electron cooling in gas-discharge plasmas is presented in the study. Directed to the use of weak magnetic fields in the sources of negative hydrogen ion beams for additional heating of fusion plasmas, hydrogen discharges have been considered. The numerical results obtained within a 2D model are stressed. The 1D model presented aims at showing main trends whereas the results obtained within the 3D model, also developed, come to confirm the 2D-model description. The models outline importance of the transport phenomena: electron-energy and charged-particle fluxes. Reduction of the thermal flux across the magnetic field together with thermal diffusion and diffusion, acting in a combination, are in the basis of the electron cooling and of the spatial distribution of the electron density. Effects due to the ) ( B E × -drift and to the diamagnetic drift form the fine spatial structure of the plasma-parameter variations. IntroductionThe development of sources of negative ion beams for fusion plasma heating by neutral beam injection [1-4] is one of the stimuli motivating the active research on low-pressure hydrogen discharges. In general, the sources of negative hydrogen ions with volume-production based processes as well as the hybrid sources where surface production is employed are tandem-type sources with a construction ensuring space separation of regions of high and low electron temperature [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19]. Thus, electron cooling in the discharge is needed and this is provided by a magnetic filter.The magnetic filter is a localized transverse magnetic field. Its effect for cooling the electrons has been proved both experimentally [3,6,7,13,[20][21][22][23][24][25][26], by probe diagnostics and measurements of the current density of the extracted negative ions, and theoretically [6][7][8][9][10][11][12]15,27] by modelling and discussions on the mechanisms governing the operation of the filter. The fluid-plasma models [6][7][8][9][10]15] of the magnetic filter involve importance of the transport processes. However, the different models stress different aspects as mechanisms of the filter operation: (i) reduction of the electron mobility and of the diffusion in magnetized plasmas acting in a combination with the temperature dependence of the Coulomb collision frequency, the latter considered as a factor ensuring lower diffusion of the hot electrons; (ii) thermal conductivity effects, again acting together with Coulomb collisions; (iii) importance of the Lorentz force showing evidence due to cancelled effects of the -) ( B E × and diamagnetic drifts; (iv) importance of the diamagnetic drift; (v) diffusion acting together with elastic electron-neutral collisions. Both 1D and 2D models have been developed, however, as it has been usually stressed, 2D models are needed for proper description of the problem. Due to the complexity of the description, simplifying assumptions, like neglecting of col...

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“…the discharge current density can be higher than normal, but, unlike discharge in the absence of magnetic field, this discharge occupies a small part of the target electrode surface. The potential distribution in a magnetron discharge plasma [72,73] and corresponding electric field lines [74] ensure APPLICATION OF DUSTY PLASMA FOR PRODUCTION formation of an electrostatic trap for particles in such plasma, even if the electrode does not have macroscopic deviations from a plane shape. Plasma electrons move along magnetic field lines (see Fig.…”

Section: Deposition Of Coatings On Particles In An Rf Magnetron Dischmentioning

confidence: 99%

Application of dusty plasma for production of disperse composite materials

et al. 2015

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Objectives and achievements of the production of disperse composite materials (DCMs) which consist of particles with a metal coating are represented. The prospects of the DCM production by the dusty plasma method based on confining a cloud of micron-sized particles in a discharge plasma and on magnetron sputtering are shown. The method was tested in the preparation of catalyst materials, a superhard diamond polycrystalline material, and a polyquasicrystalline material with a low friction coefficient. The results of investigations of the structure and properties of powdered and sintered DCMs are presented.

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Two-dimensional fluid approach to the dc magnetron discharge

Cited by 56 publications

References 53 publications

High power impulse magnetron sputtering discharge

High power impulse magnetron sputtering discharge

Magnetic filter operation in hydrogen plasmas

Application of dusty plasma for production of disperse composite materials

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