The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron target in unipolar pulses at low duty cycle and low repetition frequency while keeping the average power about 2 orders of magnitude lower than the peak power. This results in a high plasma density, and high ionization fraction of the sputtered vapor, which allows better control of the film growth by controlling the energy and direction of the deposition species. This is a significant advantage over conventional dc magnetron sputtering where the sputtered vapor consists mainly of neutral species. The HiPIMS discharge is now an established ionized physical vapor deposition technique, which is easily scalable and has been successfully introduced into various industrial applications. The authors give an overview of the development of the HiPIMS discharge, and the underlying mechanisms that dictate the discharge properties. First, an introduction to the magnetron sputtering discharge and its various configurations and modifications is given. Then the development and properties of the high power pulsed power supply are discussed, followed by an overview of the measured plasma parameters in the HiPIMS discharge, the electron energy and density, the ion energy, ion flux and plasma composition, and a discussion on the deposition rate. Finally, some of the models that have been developed to gain understanding of the discharge processes are reviewed, including the phenomenological material pathway model, and the ionization region model.

No abstract

We investigate localized magnetosheath and solar wind density enhancements, associated with clear magnetic field changes, and therefore referred to as magnetosheath/solar wind plasmoids, respectively. Using Cluster data, we show that there are two distinct populations of magnetosheath plasmoids, one associated with a decrease of magnetic field strength (diamagnetic plasmoids), and one with an increased magnetic field strength (paramagnetic plasmoids). The diamagnetic magnetosheath plasmoids have scale sizes of the order of 1–10 RE, while the paramagnetic ones are an order of magnitude smaller. The diamagnetic plasmoids are not associated with any change in the magnetosheath plasma flow velocity, and they are classified as embedded plasmoids in the terminology of Karlsson et al. (2012). The paramagnetic plasmoids may either be embedded or associated with increases in flow velocity (fast plasmoids). A search for plasmoids in the pristine solar wind resulted in identification of 62 diamagnetic plasmoids with very similar properties to the magnetosheath diamagnetic plasmoids, making it probable that the solar wind is the source of these structures. No paramagnetic plasmoids are found in the pristine solar wind, indicating that these are instead created at the bow shock or in the magnetosheath. We discuss the relation of the plasmoids to the phenomenon of magnetosheath jets, with which they have many properties in common, and suggest that the paramagnetic plasmoids can be regarded as a subset of these or a closely related phenomenon. We also discuss how the results from this study relate to theories addressing the formation of magnetosheath jets.

A time-dependent plasma discharge model has been developed for the ionization region in a high-power impulse magnetron sputtering (HiPIMS) discharge. It provides a flexible modeling tool to explore, e.g., the temporal variations of the ionized fractions of the working gas and the sputtered vapor, the electron density and temperature, and the gas rarefaction and refill processes. A separation is made between aspects that can be followed with a certain precision, based on known data, such as excitation rates, sputtering and secondary emission yield, and aspects that need to be treated as uncertain and defined by assumptions. The input parameters in the model can be changed to fit different specific applications. Examples of such changes are the gas and target material, the electric pulse forms of current and voltage, and the device geometry. A basic version, ionization region model I, using a thermal electron population, singly charged ions, and ion losses by isotropic diffusion is described here. It is fitted to the experimental data from a HiPIMS discharge in argon operated with 100 µs long pulses and a 15 cm diameter aluminum target. Already this basic version gives a close fit to the experimentally observed current waveform, and values of electron density n e , the electron temperature T e , the degree of gas rarefaction, and the degree of ionization of the sputtered metal that are consistent with experimental data. We take some selected examples to illustrate how the model can be used to throw light on the internal workings of these discharges: the effect of varying power efficiency, the gas rarefaction and refill during a HiPIMS pulse, and the mechanisms determining the electron temperature.

[1] We use Cluster multipoint density measurements, using the spacecraft potential, to identify localized density enhancements (>50%) in the magnetosheath, and estimate their three-dimensional morphology and orientation. Typically one dimension of the density enhancements is shorter than others, is directed perpendicular to the background magnetic field, and varies from $0.1 R E to 10 R E , with the other two dimensions a factor 3-10 greater. The density structures are oriented with the longest sides in the general direction of the bow shock and magnetopause. Examples of density structures both convecting with the same velocity as the background magnetosheath flow ("embedded plasmoids"), and convecting with an excess x GSE velocity component ("fast plasmoids") are found. Possible importance for the impulsive penetration mechanism for plasma entry in the magnetosphere is analyzed by comparing the results to laboratory results, via a parameter scaling. The estimation of the threedimensional topology of the density enhancements will enable a comparison with localized magnetosheath populations inside the magnetosphere, observed earlier, to determine if these originate from penetrated magnetosheath density enhancements.