Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Deposition

Dendooven, Jolien; Goris, Bart; Devloo-Casier, Kilian; Levrau, Elisabeth; Biermans, Ellen; Baklanov, Mikhaı̈l R.; Ludwig, Karl; Voort, Pascal Van Der; Bals, Sara; Detavernier, Christophe

doi:10.1021/cm203754a

Cited by 59 publications

(54 citation statements)

References 22 publications

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“…The porous silica film has mesopores of the order of several nanometers. As has already been shown in literature, 21,34,60 these structures can be either conformally coated with ALD or the pores can be sealed. To ensure a large enough penetration depth for the x-rays, and incident angle of 1 was chosen for these experiments, instead of the previously used incident angle of 0.…”

mentioning

confidence: 82%

“…This was shown for the growth of TiO 2 in porous silica films. [32][33][34] The penetration depth of x-rays for energies typically used during XRF is on the order of microns. If the thickness of the studied layers is larger than a few 100 nm, the reabsorption of fluorescent x-rays needs to be taken into account, since this changes the relation between the intensity of the fluorescent x-rays and the amount of material.…”

Section: Elemental Analysismentioning

confidence: 99%

“…Currently, several chambers have already been used to perform x-ray studies during ALD, both flow type reactors, 24,26 and pump type reactors. 29,[32][33][34] A few issues that need to be addressed when adapting or designing these chambers will be briefly discussed.…”

Section: Reactor Designmentioning

confidence: 99%

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In situ synchrotron based x-ray techniques as monitoring tools for atomic layer deposition

Devloo-Casier

Ludwig

Detavernier

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Atomic layer deposition (ALD) is a thin film deposition technique that has been studied with a variety of in situ techniques. By exploiting the high photon flux and energy tunability of synchrotron based x-rays, a variety of new in situ techniques become available. X-ray reflectivity, grazing incidence small angle x-ray scattering, x-ray diffraction, x-ray fluorescence, x-ray absorption spectroscopy, and x-ray photoelectron spectroscopy are reviewed as possible in situ techniques during ALD. All these techniques are especially sensitive to changes on the (sub-)nanometer scale, allowing a unique insight into different aspects of the ALD growth mechanisms.

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mentioning

confidence: 82%

Section: Elemental Analysismentioning

confidence: 99%

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In situ synchrotron based x-ray techniques as monitoring tools for atomic layer deposition

Devloo-Casier

Ludwig

Detavernier

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…[6][7][8] Only few studies have reported efforts to characterize ALD deposition in sub-10 nm pores. George and co-workers investigated ALD of Al 2 O 3 , TiO 2 and SiO 2 in ~5 nm tubular alumina membranes by deriving the pore diameter after each ALD half cycle from in situ N 2 conduction measurements. 13,14 This valuable in situ approach is, however, only applicable to membrane supports.…”

Section: Introductionmentioning

confidence: 99%

Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering

et al. 2014

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Atomic layer deposition (ALD) enables the conformal coating of porous materials, making the technique suitable for pore size tuning at the atomic level, e.g., for applications in catalysis, gas separation and sensing. It is, however, not straightforward to obtain information about the conformality of ALD coatings deposited in pores with diameters in the low mesoporous regime (<10 nm). In this work, it is demonstrated that in situ synchrotron based grazing incidence small angle X-ray scattering (GISAXS) can provide valuable information on the change in density and internal surface area during ALD of TiO 2 in a porous titania film with small mesopores (3-8 nm). The results are shown to be in good agreement with in situ X-ray fluorescence data representing the evolution of the amount of Ti atoms deposited in the porous film. Analysis of both datasets indicates that the minimum pore diameter that can be achieved by ALD is determined by the size of the Ti-precursor molecule.

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“…This thin film growth method is known to produce thin, conformal coatings with thickness control down to the atomic level, and has been proven successful for the synthesis and functionalization of nanostructured and highly porous materials. [12][13][14][15][16] Several authors have reported the ALD-based synthesis of TiO 2 nanotubes by using anodic alumina as a template. [17][18][19] Here, we use multi-walled carbon nanotubes (MWCNTs) as sacrificial templates.…”

Section: Introductionmentioning

confidence: 99%

Atomic layer deposition-based synthesis of photoactive TiO2 nanoparticle chains by using carbon nanotubes as sacrificial templates

Deng

Verbruggen

et al. 2014

RSC Adv.

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Highly ordered and self supported anatase TiO 2 nanoparticle chains were fabricated by calcining conformally TiO 2 coated multi-walled carbon nanotubes (MWCNTs). During annealing, the thin tubular TiO 2 coating that was deposited onto the MWCNTs by atomic layer deposition (ALD) was transformed into chains of TiO 2 nanoparticles (~12 nm diameter) with an ultrahigh surface area (137 cm 2 per cm 2 of substrate), while at the same time the carbon from the MWCNTs was removed. Photocatalytic tests on the degradation of acetaldehyde proved that these forests of TiO 2 nanoparticle chains are highly photo active under UV light because of their well crystallized anatase phase.

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Tuning the Pore Size of Ink-Bottle Mesopores by Atomic Layer Deposition

Cited by 59 publications

References 22 publications

In situ synchrotron based x-ray techniques as monitoring tools for atomic layer deposition

In situ synchrotron based x-ray techniques as monitoring tools for atomic layer deposition

Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle X-ray scattering

Atomic layer deposition-based synthesis of photoactive TiO2 nanoparticle chains by using carbon nanotubes as sacrificial templates

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