Tribological properties of TiN and TiC films in vacuum at high temperature

Yu, Zhi‐Ming; Inagawa, Konosuke; Zhujing, Jin

doi:10.1016/0040-6090(95)06612-8

Cited by 16 publications

(4 citation statements)

References 20 publications

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“…Regarding the tribological characterization, it is worth to mention that TiC has been studied by many authors [29][30][31] and in this moment the main emphasis is given to the preparation of nc-TiC/a-C nanocomposite coatings [32]. On the other hand, it is known that Ti-O coatings have the possibility to form magnelis-phase (TiO 2 − x ), which is known to have very low friction coefficients.…”

Section: Resultsmentioning

confidence: 99%

The influence of structure changes in the properties of TiCxOy decorative thin films

et al. 2007

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The main purpose of this work consists in the preparation of titanium oxycarbide, TiC x O y , thin films, in which the presence of oxygen changed the film properties between those of titanium carbide and those of titanium oxide. Varying the oxide/carbide ratio allowed to tune the structure of the films between titanium oxide and carbide and consequently electronic, mechanical and optical properties of the films. The depositions were carried out from a TiC target by direct current, dc, reactive magnetron sputtering, varying the oxygen flow rate. The obtained results showed that the film's properties can be divided into 3 different regimes -i) carbide, ii) a transition zone and iii) an oxide one. X-ray diffraction results revealed the occurrence of a face-centered cubic phase (TiC-type) for low oxygen content, also obtained in the TiC 1.6 (O) film, with a clear tendency towards amorphization with the increase of the oxygen flow rate. For the highest oxygen contents, the results revealed the development of a mixture of poorly crystallized TiO 2 phases. The colour results indicated a strong dependence on the O/Ti ratio. A progressive reduction of hardness and residual stresses with the increase of the O/Ti ratio was also observed. The residual stresses, as well as the film structure, seem to play an important role on the adhesion of the coatings. The static friction coefficient revealed also some correlation with the mechanical properties, but mainly with the surface roughness.

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Section: Resultsmentioning

confidence: 99%

The influence of structure changes in the properties of TiCxOy decorative thin films

et al. 2007

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“…Second, the microscopic friction measurements obviously differed in that they were conducted with a silicon nitride (oxidized) counterface, in contrast to the steel interfaces employed in the majority of the macroscopic studies discussed above. Indeed, the one report of a ceramic counterface (TiN) documented a relative reduction in friction coefficient with respect to analogous studies performed with a steel interface [18]. Although difference do exist, a general agreement in the trend of friction coefficients is evident.…”

Section: Discussionmentioning

confidence: 88%

“…As reported above, the friction coefficients of TiC(100), Ti 0.3 V 0.6 C(100), and VC(100) in sliding contact with a microscopic silicon nitride probe tip are 0.082, 0.129, and 0.158 under conditions of $55% relative humidity, respectively. In contrast, the friction coefficients, measured using a ring-on-disc tribometer, of TiC films synthesized by reactive ion-plating were 0.30-0.37 with a JIS SUS304 stainless steel counterface and 0.13-0.16 with a TiN coated SUS304 stainless steel counterface [18]. TiC films synthesized by plasmaassisted chemical vapor deposition exhibited a friction coefficient of 0.18 in contact with a 100 Cr6 steel ball as counterface [19].…”

Section: Discussionmentioning

confidence: 98%

Compositional dependence of the microscopic frictional properties of single crystal metal carbides

2006

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The frictional properties of TiC(100), Ti 0.3 V 0.6 C(100), and VC(100) surfaces in contact with a silicon nitride probe tip have been investigated by atomic force microscopy (AFM) under ambient pressures of dry nitrogen as well as environments of different relative humidities. Calibration of normal and lateral force has permitted the determination of the quantitative frictional properties of the three carbide samples on a nanometer length scale. In these studies, TiC(100) exhibits the lowest friction coefficient, ranging from $0.044 to $0.082 under the different environments. VC(100) and Ti 0.3 V 0.6 C(100) have similar friction coefficients ($0.07) under dry nitrogen conditions, yet VC exhibits a larger friction coefficient ($0.158) than Ti 0.3 V 0.6 C ($0.129) under conditions of higher relative humidity ($55%). Condensation of water vapor with increasing relative humidity results in an increase in the frictional response for all the three samples. The experimental results demonstrate that the frictional properties of the three carbide samples are correlated to their surface composition and surface free energy.

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“…Titanium nitride films are perspective in a wide area of applications, ranging from hard and corrosion resistant coatings [1] to diffusion barrier layers for advanced electronic devices [2][3][4]. Different formation techniques such as physical or chemical vapor deposition, and magnetron sputtering have been applied.…”

Section: Introductionmentioning

confidence: 99%

AES and XPS characterization of TiN Layers formed and modified by ion implantation

Melnik¹

1999

Semicond. Phys. Quantum Electron. Optoelectron.

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Compositional characterization of sputtered and implanted titanium nitride (TiN) layers for microelectronics application is performed based on Auger Electron Spectroscopy (AES) and X-ray induced Photoelectron Spectroscopy (XPS) data. AES shows a strong overlapping of the most intensive peaks of Ti and N. A simple empirical method using intensity relations of Auger spectra is developed for quick estimation of layer composition in small areas. Defined modification of the TiN layers was realized by means of carbon and oxygen implantation to study their influence on quantitative analysis. In difference to standard AES analysis the results of quantification using the method proposed are found to be in good agreement with XPS profiles and with results from Principal Component Analysis (PCA), where peak overlapping is excluded. The influence of oxygen was found to be crucial for standard AES analysis but it could be taken into account in the proposed method. High carbon concentrations show no significant influence on the Ti and N peak shapes.

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Tribological properties of TiN and TiC films in vacuum at high temperature

Cited by 16 publications

References 20 publications

The influence of structure changes in the properties of TiCxOy decorative thin films

The influence of structure changes in the properties of TiCxOy decorative thin films

Compositional dependence of the microscopic frictional properties of single crystal metal carbides

AES and XPS characterization of TiN Layers formed and modified by ion implantation

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