1999
DOI: 10.1016/s0042-207x(98)00391-1
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Tribological properties of PVD titanium carbides

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Cited by 34 publications
(21 citation statements)
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“…To improve the adhesion of TiCN and TiC films, the deposition was started with very thin Ti (less than 50 nm) and TiN interlayer of about 0.5 m in thickness. It was confirmed earlier [2,4,9]. The total thickness of all the films being tested was about 2.5 m.…”
Section: Film Depositionsupporting
confidence: 74%
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“…To improve the adhesion of TiCN and TiC films, the deposition was started with very thin Ti (less than 50 nm) and TiN interlayer of about 0.5 m in thickness. It was confirmed earlier [2,4,9]. The total thickness of all the films being tested was about 2.5 m.…”
Section: Film Depositionsupporting
confidence: 74%
“…The main deposition parameters during the coating were: cathode current 86 A, cathode voltage 20 V, substrate bias voltage −70 V, substrate temperature 300-350 • C [2,4]. The composition of reactive-gas mixture is expressed by the coefficient α:…”
Section: Film Depositionmentioning
confidence: 99%
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“…There were 2 important factors causing the effect of carburizing on Ti-5Al-2.5Sn to be the greatest among the 3 alloys. TiC; which its hardness (³3000 HV 18,19,39) ) is the highest in comparison with VC (³2500 HV 33,39,40) ) and Ti 2 AlC (³500 HV 41) ); was the only carbide formed and Ti content of the alloy was the highest among the 3 alloys promoting the largest quantity of TiC formation. These factors also caused the effect of carburizing on Ti-10V-2Fe-3Al to be greater than that on Ti-38Al.…”
Section: Hardnessmentioning
confidence: 99%
“…Now a variety of techniques like chemical vapour deposition (CVD) [16], pulsed laser ablation [17], cathodic arc plasma deposition [18], magnetron sputtering [7], and sputtering by ion beam [19] are successfully applied to produce these films.…”
Section: Introductionmentioning
confidence: 99%