Tribochemical polishing CVD diamond film with FeNiCr alloy polishing plate prepared by MA-HPS technique

Subsurface cleavage of diamond after high-speed three-dimensional dynamic friction polishing

“…Dynamic friction polishing (DFP) that integrates mechanical, thermal and chemical interactions has been developed in recent decades [17][18][19][20][21]. This procedure is based on the carbon dissolution in a metal wheel or can be considered as the catalytic action of such a wheel by high speed polishing, owing to the high temperature obtained by the workpiece during polishing [5,[17][18][19].…”

“…Dynamic friction polishing (DFP) that integrates mechanical, thermal and chemical interactions has been developed in recent decades [17][18][19][20][21]. This procedure is based on the carbon dissolution in a metal wheel or can be considered as the catalytic action of such a wheel by high speed polishing, owing to the high temperature obtained by the workpiece during polishing [5,[17][18][19]. It utilizes the thermo-chemical reaction induced by the dynamic friction between a diamond and a metal disk, rotating to give a high linear peripheral velocity (15-25 m s -1 ) and with contact pressures of 3-7 MPa, to enable an efficient abrasive-free polishing of single and polycrystalline diamond [19].…”

Processing and Mechanism of Dynamic Friction Polishing Diamond Using Manganese-Based Alloy

“…min. According to the catalytic theory of unpaired d electron, nickel containing unpaired d electrons was more likely to form vacant rails than copper without unpaired d electrons [17]. The existence of vacant rails could promote the conversions in bonding mode and structure of diamond, and then diamond would be transformed into graphite through phase transition of carbon.…”

Polishing, preparation and patterning of diamond for device applications

“…has also been reported on single crystal diamond with promising results by Tatsumi et al [15,16] Yuan et al proposed tribochemical polishing of polycrystalline diamond, suggesting a catalytic enhancement of the diamond-tographite conversion before mechanical removal of the graphitic material ( Figure 5). [17] Polishing defects were however clearly visible on the Scanning Electron Microscopy (SEM) image of the surface. UV photochemically enhanced polishing ( Figure 6) has also been investigated by Watanabe et al, achieving sub-nanometer roughness and reduced defect density.…”

“…The surface of the diamond is smoothed (b compared to a), however defects (darker areas in b) are observed. Taken from[17].…”