Trends in total reflection X-ray fluorescence spectrometry for metallic contamination control in semiconductor nanotechnology

Hellin, David; Gendt, Stefan De; Valckx, Nick; Mertens, Paul; Vinckier, Christiaan

doi:10.1016/j.sab.2006.03.008

Cited by 47 publications

(31 citation statements)

References 91 publications

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“…This approach allows non-destructive analysis of filters to obtain quantitative information about heavy metals in airborne particles [31][33]. However, it requires suitable reference samples to convert the measured fluorescence intensities into concentrations.…”

Section: Introductionmentioning

confidence: 99%

A new non-destructive method for chemical analysis of particulate matter filters: The case of manganese air pollution in Vallecamonica (Italy)

Borgese

Zacco

Pal

et al. 2011

Talanta

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Total Reflection X-ray Fluorescence (TXRF) is a well-established technique for chemical analysis, but it is mainly employed for quality control in the electronics semiconductor industry. The capability to analyze liquid and uniformly thin solid samples makes this technique suitable for other applications, and especially in the very critical field of environmental analysis. Comparison with standard methods like Inductively Coupled Plasma (ICP) and Atomic Absorption Spectroscopy (AAS) show that TXRF is a practical, accurate, and reliable technique in occupational settings. Due to the greater sensitivity necessary in trace heavy metal detection, TXRF is also suitable for environmental chemical analysis. In this paper we show that based on appropriate standards, TXRF can be considered for non-destructive routine quantitative analysis of environmental matrices such as air filters. This work has been developed in the frame of the EU-FP6 PHIME (Public Health Impact of long-term, low-level Mixed element Exposure in susceptible population strata) Integrated Project (www.phime.org). The aim of this work was to investigate Mn air pollution in the area of Vallecamonica (Italy).

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Section: Introductionmentioning

confidence: 99%

A new non-destructive method for chemical analysis of particulate matter filters: The case of manganese air pollution in Vallecamonica (Italy)

Borgese

Zacco

Pal

et al. 2011

Talanta

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“…52 For example, a 50 nm sized bismuth nanoparticles deposited built-in three-in-one screen-printed silver electrode has been developed for simple electrochemical sensing of H 2 O 2 in pH 7 phosphate buffer solution, as shown in Figure 2 cadmium, plumbum, chromium and zinc. [16][17][18][19][20][21][22][23][24][25] An improved bismuth film wrapped single walled carbon nanotubes (Bi/SWNTs) composite was successfully used to fabricate an electrochemical sensor for the highly sensitive detection of trace Cr(VI) in real samples with a fairly low detection limit of 0.036 nM (Fig. 3).…”

Section: Cosmeticsmentioning

confidence: 99%

Characteristics, Applications and Determination of Bismuth

Liu¹,

Xiao²,

Xu³

et al. 2016

j nanosci nanotechnol

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Bismuth has received considerable attention and been widely used in many fields due to its relatively low toxicity and special properties. This paper reviews the physical and chemical characteristics of bismuth, summarizes its applications, and introduces the techniques for the determinations of bismuth. However, the long-term use of bismuth may also bring about some side effects and even toxicity to human body, which was described here as well. In the end, we conclude the current situation and potential future of bismuth in respects of application and determination.

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“…Applying total reflection X ray fluorescence analysis (TRXF) allows solid state analysis of small mass samples with a high accuracy and a minimum preliminary sample treatment [2]. However, the accuracy of results obtained via this method depends on the matrix composition, surface morphology, and sample mass, as well as on the cali bration technique [3][4][5]. We have earlier revealed that detecting ruthenium via a nonstandard method in solid samples leads to a high amount of error, while the recovery of the alloying detection via TRXF in the solution is higher than in the analysis of suspensions [6].…”

Section: Introductionmentioning

confidence: 99%

Detecting gold in semiconducting advanced nanomaterials based on tin oxide via total reflection X-ray fluorescence analysis

Филатова

Alov

Sharanov

et al. 2015

Moscow Univ. Chem. Bull.

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A novel approach to detecting gold in tin dioxide advanced nanomaterials via total reflection X ray fluorescence analysis (TRXF) is proposed. Data of gold and tin detection acquired via the nonstandard method for powders and with the use of an internal standard technique in aqueous suspensions are compared. Accuracy of the gold detection in powder nanomaterials via TRXF without sample decomposition is shown.

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Trends in total reflection X-ray fluorescence spectrometry for metallic contamination control in semiconductor nanotechnology

Cited by 47 publications

References 91 publications

A new non-destructive method for chemical analysis of particulate matter filters: The case of manganese air pollution in Vallecamonica (Italy)

A new non-destructive method for chemical analysis of particulate matter filters: The case of manganese air pollution in Vallecamonica (Italy)

Characteristics, Applications and Determination of Bismuth

Detecting gold in semiconducting advanced nanomaterials based on tin oxide via total reflection X-ray fluorescence analysis

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