Abstract-Atomic force microscopy methods are used to study calcium phosphate coatings that are formed on surfaces of various materials, which are used in medicine, by radio frequency magnetron sputtering of a hydroxyapatite target. The roughness parameters and values of the surface potentials of metal, polymer, and hybrid substrates are determined in a semicontact regime. Calcium phosphate coatings increase the roughness of surfaces of polymer and metal materials, thus presenting a stimu lating factor for the attachment and proliferation of osteogenic cells. Using the Kelvin method, it is shown that calcium phosphate coatings change the surface potential of substrates.