Abstract:SiO x N y is an innovative material that has recently attracted a lot of attention in different and new applications, ranging from photovoltaics, conductive oxide, carbon capture; nevertheless, due to its complex and multiphase nature, the understanding of its electrical properties is still ongoing. In this framework, the present manuscript presents the investigation of electrical transport properties of nanocrystalline (nc-) SiO x N y . In fact, non-stoichiometric nc-SiO x N y films deposited by Plasma Enhanc… Show more
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