Transparent ultrananocrystalline diamond films on quartz substrate

Joseph, Pharrah; Tai, Nyan‐Hwa; Chen, Yi‐Chun; Cheng, Hsiu‐Fung; Lin, I‐Nan

doi:10.1016/j.diamond.2007.10.013

“…In this case, extremely thin nucleation interlayers were used together with Pt grids to providing the needed bias for the nucleation process: the transmittance in the UV-range is larger due to a partial consumption of the interlayers during the BEN process itself. The comparison between curves A and B shows that with BEN is possible to achieve the same transparency properties obtained with other seeding techniques [39,40]. We can conclude that not only the average transmittance is higher, but also the full exploitation of wavelengths down to the diamond bandgap limit is then fulfilled (see Fig.…”

Section: Resultsmentioning

confidence: 53%

“…Biochemical and neurophysiologic preparations, for instance, commonly use UV-visible transmission microscopy and fluorescence analysis. Transparent devices, however, can be produced in diamond technology thanks to the last decades' efforts in growing diamond on transparent substrates, like glass, quartz or even high-temperaturestable plastic [15][16][17]. It was even possible to combine diamond with CMOS (Complementary Metal Oxide Semiconductor) technologies on sapphire whereby a tolerable transparency could be preserved [18].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of a NCD microelectrode array for amperometric detection with micrometer spatial resolution

Colombo

¹

,

Men

²

,

Scharpf

³

et al. 2011

Diamond and Related Materials

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We report on the fabrication of a boron-doped nanocrystalline diamond (NCD) 3 × 3 high-density microelectrode array (MEA) for amperometric measurements, with a single electrode area of 3 × 5 μm 2 and a separation in the μm scale. The NCD microelectrodes were grown by hot filament chemical vapor deposition (HFCVD) on a double-side polished sapphire wafer in order to preserve the diamond transparency. Bias enhanced nucleation (BEN) was performed to ensure a covalent adhesion of the films to the substrate. A current background noise of less than 5 pA peak to peak over a 1 kHz bandwidth resulted from an electrochemical investigation of the new device, using 100 mM KCl solutions and ferrocyanide red-ox couples. Cyclic voltammetry measurements in physiological buffer solution and in the presence of oxidizable biomolecules strengthened its suitability for bio-sensing. When compared to a 2 × 2 NCD microelectrode array prototype, already used for in vitro cell measurements, the signal to noise ratio of the amperometric response of the new 3 × 3 device proved twice as good. In addition, the optical transmittance of the boron-doped thin layers exceeded 40% in the visible wavelength range. The excellent electrochemical properties of NCD electrodes and the transparency in combination with the high spatial resolution make the new 3 × 3 NCD MEA a promising tool for electrochemical sensing in a variety of applications, ranging from medical to industrial, in neutral or harsh environments.

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“…In fact, it is well known that surface roughness, graphitic phases embedded in the bulk, scattering at grain boundaries and thus also the average grain size influence the transmittance of diamond films [4,13,14]. In general it is found that ultra-NCD films show higher transparency due to their extremely small grain size [5]. However, the transmittance of diamond films on transparent substrates degrades generally towards lower wavelengths, probably also influenced by properties of the nucleation layer and the nucleation process itself.…”

Section: Electrode Characterizationmentioning

confidence: 94%

“…Diamond on the contrary, possessing a semiconductor bandgap of 5.47 eV, is transparent between 225 nm and 12 μm [3]. NCD has been deposited onto transparent substrates like sapphire, glass and even high temperature stable plastic [4][5][6]. However, up to now the properties of the deposited nanocrystalline films have not been discussed in conjunction with biochemical and electrochemical applications, which require high corrosion resistance.…”

Section: Introductionmentioning

confidence: 99%

Transparent microelectrode array in diamond technology

Gao¹,

Carabelli²,

Carbone³

et al. 2009

2009 IEEE 3rd International Conference on Nano/Molecular Medicine and Engineering

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We report on the development of a diamond-onsapphire microelectrode quadrupole array, substituting the commonly used inert metal electrode material by nanocrystalline diamond (NCD). This allows to combine the transparency (desired for fluorescence analysis) with the properties of an inert quasi-metallically doped diamond electrode. The NCD film was nucleated by BEN (Bias Enhanced Nucleation) on double side polished sapphire substrates and outgrown by hot filament CVD. Early quadrupole results on isolated adrenal chromaffin cells show the detection of amperometric signals corresponding to the quantal release of catecholamines contained in a single nanometric secretory vesicle.

show abstract

“…Diamond on the contrary, possessing a semiconductor bandgap of 5.47 eV, is transparent between 225 nm and 12 μm [3]. NCD has been deposited onto transparent substrates like sapphire, glass and even high temperature stable plastic [4][5][6]. However, up to now the properties of the deposited nanocrystalline films have not been discussed in conjunction with biochemical and electrochemical applications, which require high corrosion resistance.…”

Section: Introductionmentioning

confidence: 99%

Transparent microelectrode array in diamond technology

Gao

¹

,

Carabelli

²

,

Carbone

³

et al. 2010

J. Micro-Nano Mech.

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We report on the development of a diamond-onsapphire microelectrode quadrupole array, substituting the commonly used inert metal electrode material by nanocrystalline diamond (NCD). This allows to combine the transparency (desired for fluorescence analysis) with the properties of an inert quasi-metallically doped diamond electrode. The NCD film was nucleated by BEN (Bias Enhanced Nucleation) on double side polished sapphire substrates and outgrown by hot filament CVD. Early quadrupole results on isolated adrenal chromaffin cells show the detection of amperometric signals corresponding to the quantal release of catecholamines contained in a single nanometric secretory vesicle.

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Transparent ultrananocrystalline diamond films on quartz substrate

Cited by 11 publications

References 22 publications

Fabrication of a NCD microelectrode array for amperometric detection with micrometer spatial resolution

Fabrication of a NCD microelectrode array for amperometric detection with micrometer spatial resolution

Transparent microelectrode array in diamond technology

Transparent microelectrode array in diamond technology

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