2014
DOI: 10.1016/j.apsusc.2014.05.024
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Transmission electron microscopy on early-stage tin oxide film morphology grown by atmospheric pressure chemical vapor deposition

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Cited by 3 publications
(5 citation statements)
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“…Samples for transmission electron microscopy (TEM) analysis were prepared on custommade TEM grids (Lionix BV) which consist of a silicon frame and a central part that was etched away to create a 15-20 nm thick silicon nitride membrane window (100 Â 100 mm 2 ) where the electron beam can pass. [28][29][30][31] Prior to tungsten sputtering, the TEM grids were calcined in dry air to form a 3 nm thick surface layer of silicon oxide. 28 Characterization X-ray photoelectron spectroscopy (XPS) was recorded on a Thermo Scientific K-Alpha instrument equipped with a monochromatic X-ray source (hn(Al Ka) = 1486.6 eV).…”
Section: Materials Synthesismentioning
confidence: 99%
“…Samples for transmission electron microscopy (TEM) analysis were prepared on custommade TEM grids (Lionix BV) which consist of a silicon frame and a central part that was etched away to create a 15-20 nm thick silicon nitride membrane window (100 Â 100 mm 2 ) where the electron beam can pass. [28][29][30][31] Prior to tungsten sputtering, the TEM grids were calcined in dry air to form a 3 nm thick surface layer of silicon oxide. 28 Characterization X-ray photoelectron spectroscopy (XPS) was recorded on a Thermo Scientific K-Alpha instrument equipped with a monochromatic X-ray source (hn(Al Ka) = 1486.6 eV).…”
Section: Materials Synthesismentioning
confidence: 99%
“…AFM images of 130 and 215 cycles illustrate the formation of lots of SnO 2 particles (Figure S5a,b). This behavior demonstrates the growth of SnO 2 thin films resulted at the initial stage as the island shape by the Volmer–Weber mechanism rather than an ideal layer-by-layer growth . Cross-sectional TEM images (Figure S5c–f′) demonstrate that the seed layers are quite uniform and show conformal growth, even at lower number of deposition cycles that could be attributed to the accumulation of uniform SnO 2 island nanoparticles, as viewed in the cross-sectional images.…”
Section: Results and Discussionmentioning
confidence: 81%
“…This behavior demonstrates the growth of SnO 2 thin films resulted at the initial stage as the island shape by the Volmer−Weber mechanism rather than an ideal layer-by-layer growth. 23 Cross-sectional TEM images (Figure S5c−f′) demonstrate that the seed layers are quite uniform and show conformal growth, even at lower number of deposition cycles that could be attributed to the accumulation of uniform SnO 2 island nanoparticles, as viewed in the cross-sectional images. To further understand the dispersion morphologies and crystallinity, TEM analysis (Figure 3e−h) of seed layers deposited directly onto SiO grids (ALD cycles are considered according to the Si wafer thickness) was investigated.…”
Section: ■ Results and Discussionmentioning
confidence: 91%
“…The electrical properties of tin oxide film are highly dependent on oxygen stoichiometry [3]. Various types of deposition techniques are chemical vapor deposition [8], sputtering [9], sol-gel method [10], spin coating [11], and spray pyrolysis [12].…”
Section: Introductionmentioning
confidence: 99%
“…Several previous studies have conducted experiments using DMTC (dimethyltin dichloride) precursors, but most used CVD (chemical vapor deposition) method in their research. Mannie, G.J.A studied the surface characteristics of tin oxide thin films through CVD method utilizing TTC (tin tetrachloride) precursors, DMTC, and MBTC (monobutyl tin trichloride) [8]. Van Mol et.…”
Section: Introductionmentioning
confidence: 99%