Trajectory effect on the properties of large area ZnO thin films deposited by atmospheric pressure plasma jet

Plasma polymerization of acrylic acid onto polystyrene by cyclonic plasma at atmospheric pressure

“…The capability of atmospheric-pressure plasma in large-area plasma polymerization to achieve these requirements has been demonstrated. 6,7) However, because of the high gas temperature in the discharge, the usage of atmospheric-pressure plasma discharges has yet to be completely realized compared with lowpressure plasma discharges. As a consequence, low-temperature atmospheric-pressure plasma polymerization systems are required.…”

Effect of main gas and carrier gas on ZnO thin films deposited by atmospheric pressure plasma jet

“…1. The detailed description of this system has been described in our previous paper [26]. Briefly, it consists of a plasma jet, a direct current (DC) pulsed power source, an ultrasonic atomizer, and a computer-controlled X-Y hot plate.…”

“…ZnO heavily doped with metals, such as Al, Ga and In, shows Fermi level degeneration and thus behaves metallic along with its high transparency [11]. Several methods have been developed to deposit ZnO films, including pulsed laser deposition [12], molecular-beam epitaxy [13], sputtering [14], plasma-enhanced chemical vapor deposition [15,16], metalorganic chemical vapor deposition [17,18], dip coating [19,20], spray pyrolysis [6,7,21], atomic layer deposition [18,[22][23][24], and atmospheric pressure plasma jet (APPJ) [25][26][27]. Among those methods, APPJ does not require a vacuum chamber, and is suitable for large-area devices such as solar cells and antireflective window coatings.…”

Finite element analysis and equivalent parallel-resistance model for conductive multilayer thin films

“…Since 1975 the four-point probe method has been established as a reference procedure of the American Society for Testing and Materials Standards in the microelectronics industry [2], and has been widely used for characterizing the electrical properties of thin films for many applications, such as solar cells [3,4], liquid crystal displays, light-emitting devices [5], flat panel displays [6] and a variety of microelectronics [7] and photovoltaics [8]. For example, the performance of thin-film solar cells depends greatly on the magnitude and uniformity of the electrical properties of a transparent conductive oxide (TCO) [9,10].…”