Towards rapid large-scale LIPSS fabrication by 4-beam ps DLIP

Hauschwitz, Petr; Jochcova, D.; Jagdheesh, R.; Rostohar, Danijela; Brajer, Jan; Kopeček, Jaromı́r; Cimrman, Martin; Smrž, Martin; Mocek, Tomáš; Lucianetti, Antonio

doi:10.1016/j.optlastec.2020.106532

Cited by 30 publications

(17 citation statements)

References 18 publications

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“…The uneven energy distribution caused by laser interference can greatly improve the processing efficiency of array pattern. Hauschwitzet al [52] used four-beam laser fabricated 1520 spots with LSFL in 50 ms and 1016 spots with HSFL in 5 ms. Compared with the single beam method, the productivity was significantly improved.…”

Section: Direct Laser Interference Patterningmentioning

confidence: 99%

Laser processing of micro/nano biomimetic structures

Xiao

Liu

et al. 2021

Micro & Nano Letters

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Inspired by nature, many researchers have noticed that the micro-and nano-structures originated from organism's surfaces which indict unique properties such as superhydrophobicity, drag reduction, structure colour have much use in academic value. However, conventional processing methods for mimicking biomimetic surface need multistep and is time wasted, not environmental friendly and uneconomic. Thanks to the development of ultrafast laser technology, the pulse duration can reach femtosecond scale, which can precisely realize micro-and nano-processing in one-step. Here, we introduce and demonstrate the principles of some typical properties. The typical structures caused by interaction between laser and material are discussed. Moreover, laser-processing methods for biomimetic surface are highlighted to achieve specialized performance. This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.

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Section: Direct Laser Interference Patterningmentioning

confidence: 99%

Laser processing of micro/nano biomimetic structures

Xiao

Liu

et al. 2021

Micro & Nano Letters

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“…Finally, it is worthy to mention, another interesting technique for nano-and micropatterning is Direct Laser Interference Patterning (DLIP), where the interference between two or more laser beams is employed to create unique periodic structures [104][105][106][107][108].…”

Section: Non-conventional Techniques For Lipss Fabricationmentioning

confidence: 99%

LIPSS Applied to Wide Bandgap Semiconductors and Dielectrics: Assessment and Future Perspectives

Mastellone

Pace²,

Curcio

et al. 2022

Materials

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With the aim of presenting the processes governing the Laser-Induced Periodic Surface Structures (LIPSS), its main theoretical models have been reported. More emphasis is given to those suitable for clarifying the experimental structures observed on the surface of wide bandgap semiconductors (WBS) and dielectric materials. The role played by radiation surface electromagnetic waves as well as Surface Plasmon Polaritons in determining both Low and High Spatial Frequency LIPSS is briefly discussed, together with some experimental evidence. Non-conventional techniques for LIPSS formation are concisely introduced to point out the high technical possibility of enhancing the homogeneity of surface structures as well as tuning the electronic properties driven by point defects induced in WBS. Among these, double- or multiple-fs-pulse irradiations are shown to be suitable for providing further insight into the LIPSS process together with fine control on the formed surface structures. Modifications occurring by LIPSS on surfaces of WBS and dielectrics display high potentialities for their cross-cutting technological features and wide applications in which the main surface and electronic properties can be engineered. By these assessments, the employment of such nanostructured materials in innovative devices could be envisaged.

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“…As shown in previous works 33 , a beam splitter DOE was designed to have a period equal to 0.65 times the input beam size, to achieve a dense pattern of intensity with a distance between maxima equal to the size of a diffraction limited spot. Input beam size was selected as 8 mm, to account for the optics clear aperture of 14 mm, resulting in a diffraction limited spot size of ~ 20 µm and a DOE period of 5150 µm which are typical values for tribology and hydrophobic applications 48 – 50 . To cover an area of 1 × 1 mm, a splitter with 51 × 51 was designed, having full angles of 10 × 10 mrad (separation angles 0.2 mrad × 0.2 mrad) and efficiency ~ 80%.…”

Section: Beamspliting With Diffractive Laser Induced Texturing (Dlite) Elementsmentioning

confidence: 99%

LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal processes measurement

Hauschwitz

Martan

Bicistova

et al. 2021

Sci Rep

Self Cite

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A unique combination of the ultrashort high-energy pulsed laser system with exceptional beam quality and a novel Diffractive Optical Element (DOE) enables simultaneous production of 2601 spots organized in the square-shaped 1 × 1 mm matrix in less than 0.01 ms. By adjusting the laser and processing parameters each spot can contain Laser Induced Periodic Surface Structures (LIPSS, ripples), including high-spatial frequency LIPSS (HFSL) and low-spatial frequency LIPSS (LSFL). DOE placed before galvanometric scanner allows easy integration and stitching of the pattern over larger areas. In addition, the LIPSS formation was monitored for the first time using fast infrared radiometry for verification of real-time quality control possibilities. During the LIPSS fabrication, solidification plateaus were observed after each laser pulse, which enables process control by monitoring heat accumulation or plateau length using a new signal derivation approach. Analysis of solidification plateaus after each laser pulse enabled dynamic calibration of the measurement. Heat accumulation temperatures from 200 to 1000 °C were observed from measurement and compared to the theoretical model. The temperature measurements revealed interesting changes in the physics of the laser ablation process. Moreover, the highest throughput on the area of 40 × 40 mm reached 1910 cm2/min, which is the highest demonstrated throughput of LIPSS nanostructuring, to the best of our knowledge. Thus, showing great potential for the efficient production of LIPSS-based functional surfaces which can be used to improve surface mechanical, biological or optical properties.

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Towards rapid large-scale LIPSS fabrication by 4-beam ps DLIP

Cited by 30 publications

References 18 publications

Laser processing of micro/nano biomimetic structures

Laser processing of micro/nano biomimetic structures

LIPSS Applied to Wide Bandgap Semiconductors and Dielectrics: Assessment and Future Perspectives

LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal processes measurement

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