2021
DOI: 10.1038/s41598-021-02290-3
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LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal processes measurement

Abstract: A unique combination of the ultrashort high-energy pulsed laser system with exceptional beam quality and a novel Diffractive Optical Element (DOE) enables simultaneous production of 2601 spots organized in the square-shaped 1 × 1 mm matrix in less than 0.01 ms. By adjusting the laser and processing parameters each spot can contain Laser Induced Periodic Surface Structures (LIPSS, ripples), including high-spatial frequency LIPSS (HFSL) and low-spatial frequency LIPSS (LSFL). DOE placed before galvanometric scan… Show more

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Cited by 25 publications
(24 citation statements)
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“…The surface functionalization that can be achieved in a singlestep process when creating LIPSS can change optical, mechanical, or chemical surface properties (Hauschwitz et al, 2021). For instance, control of the wetting properties of stainless steel was achieved using LIPSS created at different laser fluences (Indrišiūnas et al, 2022).…”
Section: Introductionmentioning
confidence: 99%
“…The surface functionalization that can be achieved in a singlestep process when creating LIPSS can change optical, mechanical, or chemical surface properties (Hauschwitz et al, 2021). For instance, control of the wetting properties of stainless steel was achieved using LIPSS created at different laser fluences (Indrišiūnas et al, 2022).…”
Section: Introductionmentioning
confidence: 99%
“…Despite this progress, the capacity to produce micro and nanoscale surface features over large areas represents a significant challenge in terms of production technology, throughput and cost. In the last years, multi-beam technology was proven to significantly improve productivity by parallelization into more than 1000 simultaneously structuring laser beams [10][11][12][13][14]. However, for components with a complex 3D geometry lower number of beams or complex strategies have to be applied, which decreases the throughput.…”
Section: Introductionmentioning
confidence: 99%
“…For the so called LSFL, this periodic intensity translates into an ablation pattern of parallel structures with spatial dimensions ranging from nanometers up to several microns. Although the process is material-dependent [ 5 ], the study of the main processing parameters that lead to the formation of LIPSS have been identified for various metals, semiconductors and dielectrics [ 1 ], including material properties (optical [ 6 , 7 ], thermal [ 8 ], chemical [ 9 ]), processing conditions (number of effective pulses per spot unit [ 10 , 11 , 12 ], scanning direction vs. polarization [ 13 ], over-scanning [ 14 ], irradiation atmosphere [ 15 ], surface polishing [ 16 ], substrate temperature [ 17 , 18 ], material thickness [ 19 , 20 ]) and laser source parameters (wavelength [ 21 ], pulse duration [ 22 ], beam polarization [ 23 ], angle of incidence [ 24 ], and number of beams [ 25 , 26 ]). Lately, the increasing availability of affordable and stable high-repetition rate femtosecond lasers have been placed under the spotlight, with the laser repetition rate as a key processing parameter to investigate in detail [ 27 , 28 , 29 , 30 , 31 , 32 , 33 ].…”
Section: Introductionmentioning
confidence: 99%