Abstract:This paper describes design and fabrication of a Ti-Ni shape-memory alloy (SMA) film-actuated single crystal silicon (SCS) multi-probe device utilized for scanning probe nano-lithography (SPNL). This research focuses on the development of the device that can realize fabrication of a nanoscale mask pattern on a few millimeters square area. The designed device consists of Ti-Ni SMA film-actuated 8�8 writing-probes with an Au film-coated tip, and 2�2 tilt-adjustment probes with a piezo-resistive sensor. The SMA a… Show more
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