Fabrication of novel silicon dual atomic force microscope tip with narrow gap

Morita, Shinji; Matsukawa, Takashi; Makino, Eiji; Umino, Akihiro; Kawashima, Takahiro; Shibata, Takayuki

doi:10.1117/1.3142970

Cited by 6 publications

(9 citation statements)

References 7 publications

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“…In our early study, 2 µm-gapped dual tetrahedral Si tip with vertical and inclined (111) crystalline Si planes have been developed by using self-align etching process [5]. Figure 3 shows the fabricated dual Si tip.…”

Section: A Dual Afm Tip Fabrication With Si Trench Protection Based mentioning

confidence: 99%

“…Micro actuators for vertical motion are necessary so that a used AFM tip is touched to a sample surface and the other non-used AFM tip is released from a sample surface [5]. Figure 6 shows a dual AFM probe that consists of twin Si tips fabricated by LOCOS based process and parallel two Si cantilevers with Au/Cr heater lines.…”

Section: Dual Afm Cantilevers With Thin Film Actuatorsmentioning

confidence: 99%

“…By this process, a dual silicon AFM probe having parallel wedges with 5 µm gap [14], and nano-tweezers consisted of two opposed tetrahedral silicon tips for retrieval of DNA have been realized [12][13]. Inspired by the fabrication techniques, we have also studied fabrication of dual AFM probes with vertical tetrahedral Si tips constructed by a (111) plane and two dry-etched vertical planes [5]. In this paper, the fabrication techniques of narrow gapped dual AFM tip with a gap of 500 nm and novel dual cantilever with switching actuators are described.…”

Section: Introductionmentioning

confidence: 99%

“…There have been many reports, including our previous studies, on dual/multi AFM cantilevers for various purposes [5][6][7][8][9][10][11]. For example, a parallel shaped dual Si AFM cantilever with a bimorph thermal actuator was developed to use one tip/cantilever separately [6].…”

Section: Introductionmentioning

confidence: 99%

“…To realize in-situ imaging with high resolution after the molecular operations such as cutting, we have developed dual AFM probes which have individual nano-tips on each cantilever in order to divide the role of cutting and imaging. The concept and typical structure of the dual AFM are shown in Fig.3 [5,[15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

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Dual AFM probe for imaging and in-situ mechanical operation

Matsukawa

2014

2014 IEEE International Nanoelectronics Conference (INEC)

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This paper reviews the progress of nano-machined dual AFM probes which have functions of molecular imaging and in-situ mechanical operation. Fabrication techniques based on self-align Si etching process provided twin AFM tips with narrow gap, which minimize the offset calibration while switching from one probe to another. Dual cantilevers with thermal and magneto-strictive thin film actuators have also been developed for individual vertical deflection control for switching the two probes. Since demands to mechanical measurements and operations have been increased in biological applications, we anticipate these new techniques to contribute in fundamental biology studies in molecular level.

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Section: A Dual Afm Tip Fabrication With Si Trench Protection Based mentioning

confidence: 99%

Section: Dual Afm Cantilevers With Thin Film Actuatorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Dual AFM probe for imaging and in-situ mechanical operation

Matsukawa

2014

2014 IEEE International Nanoelectronics Conference (INEC)

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Self‐Align Fabrication of Narrow‐Gapped Dual AFM Tip Using Si Trench Refilling with SOG and Magnetostrictive Film Stacked Dual Cantilever Formation

Matsukawa

Makino

Kawashima

et al. 2015

Elect Comm in Japan

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SUMMARYThis paper reports on a novel self-align fabrication process of narrow-gapped dual AFM (atomic force microscope) tip. The dual AFM tip was fabricated on (100) orientated Si substrate by using narrow trench etching, trench refilling with SOG (spin-on-glass), CMP (chemicalmechanical polishing), and Si crystalline anisotropic etching. Through the process, a sharp dual AFM tip with a gap of 500 nm, which was defined only by the etched trench width, was successfully fabricated. Although another fabrication process using an acrylic-nitrile-styrene-epoxy resin refilling was also attempted, a dual tip was not obtained due to the poor adhesion of the resin in the silicon etching process. In addition, a dual AFM cantilever (magnetostrictive film/Si 2.0 μm) was formed by MEMS fabrication. The fabricated FePd 0.4 μm/Si 2.0 μm and Ni 1.3 μm/Si 2.0 μm cantilever were individually deflected to 1.4 μm at 300 Gauss and 0.4 μm at 240 Gauss due to effects of magnetic flux and negative magnetostriction, respectively. C⃝ 2015 Wiley Periodicals, Inc. Electron Comm Jpn, 98(12): 30-36, 2015; Published online in Wiley Online Library (wileyonlinelibrary.com).

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Fabrication and characterization of dual AFM probe with narrow-gapped silicon tips and switchable cantilevers with magneto-strictive FePd film actuator

Matsukawa

Taguchi

2017

Microelectronic Engineering

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Fabrication of novel silicon dual atomic force microscope tip with narrow gap

Cited by 6 publications

References 7 publications

Dual AFM probe for imaging and in-situ mechanical operation

Dual AFM probe for imaging and in-situ mechanical operation

Self‐Align Fabrication of Narrow‐Gapped Dual AFM Tip Using Si Trench Refilling with SOG and Magnetostrictive Film Stacked Dual Cantilever Formation

Fabrication and characterization of dual AFM probe with narrow-gapped silicon tips and switchable cantilevers with magneto-strictive FePd film actuator

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