Abstract:This paper describes novel MEMS probe card device, which is composed of silicon (Si)
cantilever beams actuated by titanium-nickel (Ti-Ni) shape memory alloy (SMA) films. Since Ti-Ni
SMA film can yield a higher work output per unit volume, Ti-Ni film-actuated Si cantilever beam is
expected to be a MEMS probe card device providing large contact force between probe and electrode
pad. The developed cantilever beam produces a contact force by not only cantilever bending in
contact but also the shape memory effect (… Show more
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