Abstract:The reliability requirements of Flash memory become more and more challenging. Flash memory technology development needs testchips to allow large statistical studies and a product-like approach. In this paper, we present a methodology of bitmap analysis to extract and follow the intrinsic and extrinsic parameters of a 40nm eFlash technology during ramp-up. This methodology is based first on analog bitmap acquisition on 512kB testchip, followed by correction of spatial variabilities like peripheral circuit infl… Show more
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