Three-dimensional transient mass transfer model for laser chemical vapor deposition of titanium on stationary finite slabs

Abstract

A mathematical model for mass transfer inside a laser chemical vapor deposition (LCVD) chamber is presented for pure titanium deposition from titanium tetrabromide on a stainless-steel (SS 304) substrate. A set of five three-dimensional, transient, and nonlinear partial differential equations is solved to account for the diffusion of various species inside the LCVD chamber and the thermal decomposition of titanium tetrabromide, titanium dibromide, and titanium monobromide at the surface of the substrate in order to determine the thickness of the titanium film deposited on the substrate. The model is used for studying the effects of various parameters on the deposition and shape of titanium films. The parameters which were varied are as follows: laser power, activation energy, total pressure inside the LCVD chamber, and partial pressure of titanium tetrabromide. Under certain conditions, the deposited titanium film is found to have a volcanic profile.

Titanium and aluminum nitride synthesis via layer by layer LA-CVD

“…Titanium nitride (TiN) is steady against chemical influences, maintains temperature up to 3000 8C and possesses electro conductivity almost twice greater than titanium [1][2][3]. Aluminum nitride also has such unique properties, as excellent thermal conductivity, high chemical resistance, high melting temperature, wide band-gap and small electron affinity [4][5][6][7].…”

Thermal modeling of chemical vapor deposition on the particle surface subjected to nanosecond laser heating

“…Accurate prediction and control of LCVI require a thermal model of the process. The physical and chemical phenomena occurred in LCVI are similar to that in LCVD, which has been investigated extensively and detailed works are presented by Kar et al (1991), Conde et al (1992), Zhang and Faghri (2000), Zhang (2003) and Lee et al (1995). The only difference is that deposition occurs on the powder particle surface during LCVI, instead of on the top of non-porous flat substrate in LCVD.…”

Numerical modeling of pyrolytic laser-induced chemical vapor deposition

“…Lax [3][4][5] determined the temperature distribution in a cylindrical semiinfinite medium considering linear and nonlinear thermal conductivity cases, and using Kirchoff's transformation. [33][34][35][36][37] Numerical models of chemical vapor deposition and LCVD processes including mass transport are even fewer. 3,4,[9][10][11][12] Moody and Hendel 10 presented an algorithm using Bessel transforms for the temperature distribution in an infinite medium during laser heating in order to generalize the models of Lax, Cline et al, Nissim et al, 6 Calder and Sue, 11 Hess et al, 13 and Kokorowsky et al 14 Burgener and Reedy, 15 Yamada et al, 16 Kant, 17 and Imen et al 18 modeled the heating of a multilayer medium.…”

“…Skouby and Jensen 19 used a finite element method to simulate the solid-and gas-phase heat transfer in a semi-infinite medium while convection was neglected. Kar, Mazumder, and co-workers 34,35,37 presented a mass transport model for LCVD. Carrido et al 21 also used a finite difference method for a semiinfinite geometry.…”