2015
DOI: 10.1021/acs.nanolett.5b02190
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Three-Dimensional Networked Nanoporous Ta2O5–x Memory System for Ultrahigh Density Storage

Abstract: Oxide-based resistive memory systems have high near-term promise for use in nonvolatile memory. Here we introduce a memory system employing a three-dimensional (3D) networked nanoporous (NP) Ta2O5-x structure and graphene for ultrahigh density storage. The devices exhibit a self-embedded highly nonlinear I-V switching behavior with an extremely low leakage current (on the order of pA) and good endurance. Calculations indicated that this memory architecture could be scaled up to a ∼162 Gbit crossbar array witho… Show more

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Cited by 52 publications
(77 citation statements)
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Memory cell density could be increased by using cross-point array devices or by scaling down the memory cell size. [21][22][23][24] Consequently, OHPs could extend the memory applications to high-density information storage by using a CMOS-compatible process such as vapor deposition.Vapor deposition methods such as hybrid chemical deposition [25][26][27] and sequential vapor deposition [28][29][30][31][32] have been widely used to deposit OHPs because these methods can realize highquality films that yield efficient, largescale photovoltaic devices. [21][22][23][24] Consequently, OHPs could extend the memory applications to high-density information storage by using a CMOS-compatible process such as vapor deposition.

Vapor deposition methods such as hybrid chemical deposition [25][26][27] and sequential vapor deposition [28][29][30][31][32] have been widely used to deposit OHPs because these methods can realize highquality films that yield efficient, largescale photovoltaic devices.

…”
mentioning
confidence: 99%
“…

Memory cell density could be increased by using cross-point array devices or by scaling down the memory cell size. [21][22][23][24] Consequently, OHPs could extend the memory applications to high-density information storage by using a CMOS-compatible process such as vapor deposition.Vapor deposition methods such as hybrid chemical deposition [25][26][27] and sequential vapor deposition [28][29][30][31][32] have been widely used to deposit OHPs because these methods can realize highquality films that yield efficient, largescale photovoltaic devices. [21][22][23][24] Consequently, OHPs could extend the memory applications to high-density information storage by using a CMOS-compatible process such as vapor deposition.

Vapor deposition methods such as hybrid chemical deposition [25][26][27] and sequential vapor deposition [28][29][30][31][32] have been widely used to deposit OHPs because these methods can realize highquality films that yield efficient, largescale photovoltaic devices.

…”
mentioning
confidence: 99%
“…About 10 nm (half of the entire thickness) was etched by Ar plasma sputtering before XPS measurements. The O 1 s spectra of the Ta 2 O 5−x layers were de-convoluted to obtain two peaks at 530.5 eV at 532.0 eV 42 44 . The first oxygen peak depicts oxygen bonded in stoichiometric Ta 2 O 5 43 , while the second oxygen peak indicates oxygen-deficient Ta 2 O 5−x , reflecting the presence of unbonded oxygen molecules (oxygen interstitials) or oxygen vacancies.…”
Section: Resultsmentioning
confidence: 99%
“…2c), which may be influenced by the junction asymmetry. 39,40 The multiple switching conductances of the TaO y /NP TaO x memristor controlled by the input voltages can be utilized as variable synaptic weights for the artificial synapse. The maximum non-linearity of the devices was ≈10 4 ; this value was obtained from the current ratio between the read voltage (defined as V r = V S /2) and −V r in the ON state and is comparable to previously reported values for 1D-1R memory devices in a densely packed crossbar array ( Supplementary Information, Fig.…”
Section: Single Tao Y /Np Tao X Memristormentioning
confidence: 99%