1994
DOI: 10.1088/0960-1317/4/4/009
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Three-dimensional micro flow manifolds for miniaturized chemical analysis systems

Abstract: A three-dimensional (3D) stack concept for the assembly of photolithographically fabricated microfluidic components is presented and discussed. The system uses silicon-based micropumps and simple planar structures which mimic standard elements of conventional flow systems. Detection is provided either by solid state electrochemical sensors or small volume optical detection. The general advantages of using micromachined flow manifolds for microchemical analysis are addressed. The particular benefits to be deriv… Show more

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Cited by 83 publications
(52 citation statements)
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“…One example is a micro total analysis system (ยต-TAS) 6 , in which sample treatment, handling, and detection are performed with three-dimensional micro-flow manifolds. 7 A new attempt to realize analytical chemistry in a liquid micro space has been studied using capillary electrophoresis or capillary electrochromatography. [8][9][10][11][12][13][14][15][16][17][18] Many studies dealing with electrically driven separation techniques on a chip have been reported, such as capillary electrophoresis [8][9][10][11][12] , free-flow electrophoresis 13 , open-channel electrochromatography 14 , micellar electrokinetic capillary chromatography 15 , capillary gel electrophoresis 16 , sizing of DNA restriction fragments 17,18 and so on.…”
mentioning
confidence: 99%
“…One example is a micro total analysis system (ยต-TAS) 6 , in which sample treatment, handling, and detection are performed with three-dimensional micro-flow manifolds. 7 A new attempt to realize analytical chemistry in a liquid micro space has been studied using capillary electrophoresis or capillary electrochromatography. [8][9][10][11][12][13][14][15][16][17][18] Many studies dealing with electrically driven separation techniques on a chip have been reported, such as capillary electrophoresis [8][9][10][11][12] , free-flow electrophoresis 13 , open-channel electrochromatography 14 , micellar electrokinetic capillary chromatography 15 , capillary gel electrophoresis 16 , sizing of DNA restriction fragments 17,18 and so on.…”
mentioning
confidence: 99%
“…MEMS is the technology of miniature actuators, valves, pumps, sensors and other such mechanisms, and when controlling fluids it is known as MEMS micro-flow device technology. [EE92,VSJMWR92,MEBH92]. Some of the current limits of BMC stem from the labor intensive nature of the laboratory work, the error rates, and the large volumes needed for certain bio-molecular reactions to occur (e.g., for searching and associative matching in wet data bases).…”
Section: Enabling Technologies and Experimental Paradigms For Bmcmentioning
confidence: 99%
“…The upper thin glass plate, acts as pumping membrane driven by a ceramic piezoelectric disc glued on top of the plate. Detection is provided by either solid state electro-chemical sensors or by small volume optical detectors [3].…”
Section: Miniaturized Chemical Analysis Systemsmentioning
confidence: 99%