This paper reviews some of the most common surface modification approaches in biosensing based on self-assembled monolayers with a particular focus on Au film thiolation and SiO2 film silanization. Such approaches are routinely used to alter the materials' surface properties towards a desired bioresponse. Furthermore, the most appropriate characterization methods towards ensuring successful surface modification are presented including XPS, HREELS, SPFS, Raman and FTIR spectroscopy as well as UPS with specific examples to demonstrate their importance. In addition, the mechanisms of fluorescent and non-fluorescent biotinylation of thiolated Au films and silanized SiO2 are discussed considering its importance in conjugating biomolecules such as enzymes, antibodies or chemokines onto surfaces, which carries high significance for biosensing applications. Finally, within this frame characterization routes towards ensuring effective attachment are discussed.