“…The former peak can be deconvoluted to three Si species, namely, Si 2p 1/2 (blue curve), Si 2p 3/2 (red curve), and Si 2 O (green curve) centered at 100, 99.4, − and 100.3 eV , binding energies, respectively. The latter broad peak in Figure d can be fitted into two Gaussian curves corresponding to the oxides of the substrates as in SiO 2 bonding at 103 eV , (cyan–blue curve) and the bonding between the organosilane Si and the inorganic silicon dioxide (Si sub –O–Si APTES ) centered at 102 eV (purple curve). ,, Based on our systematic optimization, we found that deposition at a low concentration (0.1%) and short immersion time (30 min) is optimal for yielding a 0.6 nm monolayer of APTES SAM based on ellipsometry measurement (Figure S1). Our result is consistent with both a recent report and the simulated molecular size of APTES obtained from the force fields function(Figure S2).…”