Thin‐Film Micromirror Array (TMA) for Cost‐Competitive Information Display Systems

The response of a microdisplay device as a function of viewing angle is a major element in the quality of a microdisplaybased system. Such measurements are tricky and time intensive when realized with mechanical equipment. A new system, optimized for microdisplay and based on Fourier Optics is described. It realizes luminance and color coordinates measurement up to +/-30° with 0-360° azimuth angles in one shot (less than one minute) with a resolution better than 0.1 degree. This paper shows how characterization of the microdisplay itself, or combined with its illumination, can be performed for emissive, transmissive, reflective, on and off axis illuminated microdisplay devices. In particular, how its long working distance allows the equipment to carry out measurement even through beam splitter or complicated combination cubes is described. The new tool is shown to be adequate both for R&D and manufacturing teams.

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Piezoelectric optical MEMS scanning fluorescence biosensor

Kim

Gundersen

et al. 2005

Advanced Biomedical and Clinical Diagnostic Systems III

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Fluorescence spectroscopy plays a key role in a broad area of biological and medical applications. Development of fluorescence spectroscopy micro-devices will enable construction of fully integrated platforms for clinical diagnostics. We report the design, microfabrication and testing of a piezoelectric MEMS micro-grating as a part of the development of a combined spectral/time-resolved fluorescence biosensor for tissue characterization. For the design of the device, we simulated its theoretical performance using a piezoelectric multi-morph model with appropriate diffraction geometry. The microfabrication process was based on a SiN diaphragm (formed via KOH bulk-micromachining) on which the supporting layer of the micro-cantilevers was patterned. Piezoelectric ZnO was then magnetron sputtered and patterned on the cantilever as the physical source for linear actuation with low voltage (>32V). E-beam evaporation of aluminum formed the final reflective diffraction pattern as well as the electrode connections to the device units. The device actuation and displacement were characterized using LDDM (Laser Doppler Displacement Meter). Current cantilevers designed with 500 µm wide gratings (20 µm spacing) produced a maximum 38 µm bi-polar deflection at 3.5 kHz, with scanning from 350-650 nm at 26 nm resolution (10 nm with new 10 µm period prototype). The MEMS device was designed to be integrated with a fast response photomultiplier, and thus can be used with time-resolved fluorescence detection. Because in the case of time-resolved measurements, spectral resolution is not a crucial element, this configuration allows for the compensation of the geometric limitations (linear dispersion) of a micro-scale device that require wavelength differentiation and selection.

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Thin‐Film Micromirror Array (TMA) for Cost‐Competitive Information Display Systems

Cited by 3 publications

References 3 publications

A review of micromirror arrays

A review of micromirror arrays

Contrast and colorimetry measurements versus viewing angle for microdisplays

Piezoelectric optical MEMS scanning fluorescence biosensor

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