A review of micromirror arrays

Song, Yuanping; Panas, Robert M.; Hopkins, Jonathan B.

doi:10.1016/j.precisioneng.2017.08.012

Cited by 60 publications

(39 citation statements)

References 151 publications

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“…Due to their small inertia, MEMS consume less power and perform better at high resonant frequency than polygon or galvanometric scanners [104]. For more exhaustive studies on MEMS micromirrors, the reader is referred to [104,105,106]. MEMS micromirrors can be assembled in a number of configurations:Single biaxial MEMS scanner (also called 2D or flying spot).…”

Section: Active Light Projection Technologiesmentioning

confidence: 99%

State of the Art of Underwater Active Optical 3D Scanners

Castillón

Palomer

Forest

et al. 2019

Sensors

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Underwater inspection, maintenance and repair (IMR) operations are being increasingly robotized in order to reduce safety issues and costs. These robotic systems rely on vision sensors to perform fundamental tasks, such as navigation and object recognition and manipulation. Especially, active optical 3D scanners are commonly used due to the domain-specific challenges of underwater imaging. This paper presents an exhaustive survey on the state of the art of optical 3D underwater scanners. A literature review on light projection and light-sensing technologies is presented. Moreover, quantitative performance comparisons of underwater 3D scanners present in the literature and commercial products are carried out.

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Section: Active Light Projection Technologiesmentioning

confidence: 99%

State of the Art of Underwater Active Optical 3D Scanners

Castillón

Palomer

Forest

et al. 2019

Sensors

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“…In contrast to the nanoscale where the self‐assembly is driven by chemical functional group interactions, on the microscale strain engineering forms an elegant way to create 3D microstructures from lithographically patterned 2D thin films. Notorious examples are microcylinders, [ 1,2 ] cubes, [ 3 ] and other polyhedrons, [ 4 ] which have already found applications, for instance, in electronics, [ 5–7 ] photonics, [ 8,9 ] and biology. [ 10–12 ] Self‐assembly by the roll‐up of structured thin‐film stacks into tubular “Swiss rolls” has been particularly successful in creating micromachined devices such as inductors, [ 13,14 ] capacitors, [ 15,16 ] microrobots, [ 17–19 ] and optical resonators [ 20–22 ] to only name a few.…”

Section: Figurementioning

confidence: 99%

Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications

et al. 2020

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Mechanical strain formed at the interfaces of thin films has been widely applied to self‐assemble 3D microarchitectures. Among them, rolled‐up microtubes possess a unique 3D geometry beneficial for working as photonic, electromagnetic, energy storage, and sensing devices. However, the yield and quality of microtubular architectures are often limited by the wet‐release of lithographically patterned stacks of thin‐film structures. To address the drawbacks of conventionally used wet‐etching methods in self‐assembly techniques, here a dry‐release approach is developed to roll‐up both metallic and dielectric, as well as metallic/dielectric hybrid thin films for the fabrication of electronic and optical devices. A silicon thin film sacrificial layer on insulator is etched by dry fluorine chemistry, triggering self‐assembly of prestrained nanomembranes in a well‐controlled wafer scale fashion. More than 6000 integrated microcapacitors as well as hundreds of active microtubular optical cavities are obtained in a simultaneous self‐assembly process. The fabrication of wafer‐scale self‐assembled microdevices results in high yield, reproducibility, uniformity, and performance, which promise broad applications in microelectronics, photonics, and opto‐electronics.

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“…By exploiting the surge in resonant frequency that comes from shrinking down to MEMS scales, micromirror structures can achieve refresh rates of 10 kHz or higher. 18 Broadly, mirror-based scanning tools can be classified into monolithic structures (ex: galvanometers and varifocal plates) and multi-actuator arrays. Larger monolithic structures benefit from the simplest driving schemes but, as previously mentioned, provide limited additional control and often rely on resonant-mode operation due to the high drive required of DC operation.…”

Section: Systematic Design Approachmentioning

confidence: 99%

Design framework for high-speed 3D scanning tools and development of an axial focusing micromirror-based array

Ersumo

Yalçın

Antipa

et al. 2020

MOEMS and Miniaturized Systems XIX

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Rapid 3D optical scanning of points or patterned light is widely employed across applications in microscopy, material processing, adaptive optics and surveying. Despite this broadness in applicability, embodiments of 3D scanning tools may vary considerably as a result of the specific performance needs of each application. We present here a micromirror arraybased modular framework for the systemic design of such high-speed scanning tools. Our framework combines a semicustom commercial fabrication process with a comprehensive simulation pipeline in order to optimally reconfigure pixel wiring schemes across specific applications for the efficient allocation of available degrees of freedom. As a demonstration of this framework and to address existing bottlenecks in axial focusing, we produced a 32-ring concentric micromirror array capable of performing random-access focusing for wavelengths of up to 1040 nm at a response rate of 8.75 kHz. By partitioning the rings into electrostatically driven piston-mode pixels, we are able to operate the array through simple openloop 30 V drive, minimizing insertion complexity, and to ensure stable operation by preventing torsional failure and curling from stress. Furthermore, by taking advantage of phase-wrapping and the 32 degrees of freedom afforded by the number of independently addressable rings, we achieve good axial resolvability across the tool's operating range with an axial fullwidth-half-maximum to range ratio of 3.5% as well as the ability to address focus depth-dependent aberrations resulting from the optical system or sample under study.

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A review of micromirror arrays

Cited by 60 publications

References 151 publications

State of the Art of Underwater Active Optical 3D Scanners

State of the Art of Underwater Active Optical 3D Scanners

Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications

Design framework for high-speed 3D scanning tools and development of an axial focusing micromirror-based array

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