Thin ferroelectric interferometer for spatial light modulations

Abstract

Thin ferroelectric interferometers (TFI's) for use as light-modulating devices were fabricated entirely with thin-film techniques on sapphire substrates. The ferroelectric layer in the TFI devices was a lead lanthanum zirconated titanate thin-film material, which can be formed from a chemical solution on highly reflective dielectric mirror surfaces. Light intensity modulation in both transmission and reflection modes was demonstrated with the fabricated devices. Experimental data and simulations show that TFI devices possess tremendous potential in spatial light modulators because of their fast-switching, low-driving voltage and readiness for integration with a variety of substrates, including silicon.

Electrical tunable Fabry–Perot interferometer using a poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) terpolymer

“…Due to the opposite sign of the field-induced strain and the refractive index change from the electro-optic effect, the FPI using a terpolymer film directly as the cavity of the etalon shows a smaller tunability (0.78% under 100 V/µm Fabry-Perot interferometer (FPI) has been used widely in high resolution spectroscopy, as electro-optical (E-O) modulators and optical filters. [1][2][3][4][5][6][7] Recently, a great deal of effort has been devoted to developing high performance tunable FPI, which can be operated by the change of refractive index of etalons or the space between two reflective mirrors with the external stimulus, such as electric, magnetic field, or temperature change. [1][2][3][4][5][6][7] One key parameter in selecting an active material or device for tunable FPI is the large tunable range.…”

“…[1][2][3][4][5][6][7] Recently, a great deal of effort has been devoted to developing high performance tunable FPI, which can be operated by the change of refractive index of etalons or the space between two reflective mirrors with the external stimulus, such as electric, magnetic field, or temperature change. [1][2][3][4][5][6][7] One key parameter in selecting an active material or device for tunable FPI is the large tunable range. Therefore, materials with large E-O effect or large electric field-induced strain are very attractive for electric tunable FPIs.…”

“…16 For an isotropic dipolar system, it can be deduced from the Lorentz-Lorenz relation that 13,17 p = ͑n 2 + 2͒͑n 2 − 1͒ 3n 4 . ͑8͒…”

Surface relief diffraction gratings for modulation enhancement in PLZT thin films

“…PLZT thin films are ideal for use in integrated optics because they possess good transparency in the visible and IR, and a high refractive index ( 2.5 @ 633 nm n ≈ ) for great light wave confinement. They have been effectively investigated as light waveguides 8 , as well as spatial light modulators using various techniques 9,10,11 .…”

Electrical and optical properties of lanthanum-modified lead zirconate titanate thin films by radio-frequency magnetron sputtering

“…[6][7][8]10 Until now, the optical properties of the films have been relatively less investigated. 5,11 PLZT films were prepared using various techniques, such as sol-gel, 6 rf sputtering, 10 and pulsed-laser deposition. 12 However, the electrical and optical properties of the films are usually much inferior to those of bulk materials.…”