Thickness uniformity of vacuum deposited layers

Todorova, S; Popov, D.; Dimitrov, Emil; Dochev, D; Kanev, M.

doi:10.1016/0042-207x(88)90482-4

Cited by 4 publications

(1 citation statement)

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“…The properties of physics and chemistry can be acquired by designing different structures. Titanium dioxide has attracted considerable attention as it can be used for a variety of applications, the catalyst, gas sensor [8], photo-catalysts [9] and optic electrical device. The property of titanium dioxide is suitable for optic electrical device [10] due high refractive index, low absorption efficient, good transfer in the visible-near infrared region [11].…”

Section: Introductionmentioning

confidence: 99%

Effect of Thickness on GLAD TiO<sub>2</sub> Thin Films with Incline Spinning Substrate on Rotating Holder (ISSRH) Technique

Mekla

Pukird

Porntheerapat

et al. 2011

AMR

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The report presents the effects of the thickness on the TiO2 thin films prepared by the GLAD technique with incline spinning substrate on rotating holder (ISSRH) by using the electron beam evaporation. The prepared films were heated at 500 °C for 2 hr in air. The microstructure of films was investigated by UV- visible photometer, X-ray diffraction, XRD and field emission scanning electron microscope, FE-SEM. The results showed the thickness of 10, 50, 100 and 300 nm films exhibited continuity distribution of the crystalline. The crystalline structure evidenced the dominant peak at the 300 nm thickness. GLAD TiO2 films exhibited the columnar growth and porosity. The TiO2 nanostructures showed rutile phase.

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Section: Introductionmentioning

confidence: 99%

Effect of Thickness on GLAD TiO<sub>2</sub> Thin Films with Incline Spinning Substrate on Rotating Holder (ISSRH) Technique

Mekla

Pukird

Porntheerapat

et al. 2011

AMR

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Layer uniformity of glancing angle deposition

Wang

Shao

Yao

et al. 2005

Vacuum

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Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSi_x Sputtering Films

Yamazaki¹,

Matsuda²,

Nakatani³

1990

Jpn. J. Appl. Phys.

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To date, various connection rerouting methods for connection-oriented mobile networks have been proposed. The previous methods, however, are limited to specific topologies or environments. In this paper, we propose the connection-information-based rerouting widely applicable to various connection-oriented mobile networks. This method requires neither a specific topology nor a complex connection, enables fast rerouting, provides appropriate route optimality, and can be extended easily.

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Thickness uniformity of vacuum deposited layers

Cited by 4 publications

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Effect of Thickness on GLAD TiO<sub>2</sub> Thin Films with Incline Spinning Substrate on Rotating Holder (ISSRH) Technique

Effect of Thickness on GLAD TiO<sub>2</sub> Thin Films with Incline Spinning Substrate on Rotating Holder (ISSRH) Technique

Layer uniformity of glancing angle deposition

Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSi_x Sputtering Films

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Thickness uniformity of vacuum deposited layers

Cited by 4 publications

References 0 publications

Effect of Thickness on GLAD TiO<sub>2</sub> Thin Films with Incline Spinning Substrate on Rotating Holder (ISSRH) Technique

Effect of Thickness on GLAD TiO<sub>2</sub> Thin Films with Incline Spinning Substrate on Rotating Holder (ISSRH) Technique

Layer uniformity of glancing angle deposition

Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSix Sputtering Films

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Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSi_x Sputtering Films