Thermoelectric Enhancement of Silicon Membranes by Ultrathin Amorphous Films

George, Anthony; Yanagisawa, Ryoto; Anufriev, Roman; He, Junyang; Yoshie, Naoko; Tsujii, Naohito; Guo, Quansheng; Mori, Takao; Volz, Sébastian; Nomura, Masahiro

doi:10.1021/acsami.8b21003

Cited by 28 publications

(23 citation statements)

References 38 publications

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“…The thermal conductivity for the doped sample is lower than the k = 55 Wm −1 K −1 as described in other studies, due to the high concentration of aluminum dopant (Fig. 14a) [84]. This reduction can be attributed to the change in phonon boundary scattering due to the amorphous aluminum layer.…”

Section: The Thermoelectric Power Of Silicon Membranementioning

confidence: 50%

“…Researchers are continuously looking for ways to increase the ZT of silicon and silicon-based materials [84]. The thermoelectric power of the silicon membrane is much lower (ZT of ~ 0.001) than that of common carbon-based composites and alloys that are widely employed for energy harvesters.…”

Section: The Thermoelectric Power Of Silicon Membranementioning

confidence: 99%

Section: The Thermoelectric Power Of Silicon Membranementioning

confidence: 99%

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Thermoelectric Energy Harvesters: A Review of Recent Developments in Materials and Devices for Different Potential Applications

et al. 2020

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The thermoelectric effect encompasses three different effects, i.e. Seebeck effect, Peltier effect, and Thomson effect, which are considered as thermally activated materials that alter directions in smart materials. It is currently considered one of the most challenging green energy harvesting mechanisms among researchers. The ability to utilize waste thermal energy that is generated by different applications promotes the use of thermoelectric harvesters across a wide range of applications. This review illustrates the different attempts to fabricate efficient, robust and sustainable thermoelectric harvesters, considering the material selection, characterization, device fabrication and potential applications. Thermoelectric harvesters with a wide range of output power generated reaching the milliwatt range have been considered in this work, with a special focus on the main advantages and disadvantages in these devices. Additionally, this review presents various studies reported in the literature on the design and fabrication of thermoelectric harvesters and highlights their potential applications. In order to increase the efficiency of equipment and processes, the generation of thermoelectricity via thermoelectric materials is achieved through the harvesting of residual energy. The review discusses the main challenges in the fabrication process associated with thermoelectric harvester implementation, as well as the considerable advantages of the proposed devices. The use of thermoelectric harvesters in a wide range of applications where waste thermal energy is used and the impact of the thermoelectric harvesters is also highlighted in this review.

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Section: The Thermoelectric Power Of Silicon Membranementioning

confidence: 50%

Section: The Thermoelectric Power Of Silicon Membranementioning

confidence: 99%

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Thermoelectric Energy Harvesters: A Review of Recent Developments in Materials and Devices for Different Potential Applications

et al. 2020

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“…Our samples were fabricated using the standard topdown fabrication methods on a silicon-on-insulator wafer. The wafer had a top 145-nm-thick monocrystalline silicon layer with atomically smooth (σ = 0.2 nm) top and bottom surfaces [15,16] First, we deposited aluminum pads on the surface of silicon. Next, we used electron-beam Comparison of the predictions of the original seminumerical approach proposed by Hao et al [13] with those of our fully analytical method.…”

Section: B Sample Fabricationmentioning

confidence: 99%

Measurement of the phonon mean free path spectrum in silicon membranes at different temperatures using arrays of nanoslits

2020

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Knowledge of the phonon mean free path (MFP) holds the key to understanding the thermal properties of materials and nanostructures. Although several experiments measured the phonon MFP in bulk silicon, MFP spectra in thin membranes have not been directly measured experimentally yet. In this work, we experimentally probe the phonon MFP spectra in suspended silicon membranes. First, we measure the thermal conductivity of membranes with arrays of slits at different temperatures. Next, we develop a fully analytical procedure to extract the accumulated thermal conductivity as a function of the MFP. The measured phonon MFP in 145-nm-thick membranes with the surface roughness of 0.2 nm is shorter than that in bulk due to the scattering at the membrane boundaries. At room temperature, the phonon MFP does not exceed 400 nm. However, at 4 K, the MFP becomes longer, and some phonons can travel ballistically for up to one micrometer. These results thus shed light on the long-lasting question of the range of ballistic phonon transport at different temperatures in nanostructures based on silicon membranes.

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“…78 George et al further demonstrated a 30-40% lower thermal conductivity in silicon membranes covered with aluminum films, leading to significantly enhanced thermoelectric performance. 79 Figure 5 shows the measured in-plane 𝑘 𝐿 of four DRIE-drilled samples and two FIB-drilled samples. 66 Based on the TEM and SEM studies, the pore radius is expanded by 13-40 nm for DRIE samples with pore diameters of 94 to 300 nm, and ~50 nm for FIB samples with pore diameters of 200 and 300 nm.…”

Section: Summary Of Existing Thermal Measurements On Periodic Nanopor...mentioning

confidence: 99%

Phonon Transport within Periodic Porous Structures — From Classical Phonon Size Effects to Wave Effects

Xiao¹,

Chen²,

Ma³

et al. 2019

ES Mater.Manuf.

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ΩSolid angle SubscriptsGPnC SiNW Graphene phononic crystal Silicon nanowire NCJ_MC Nano-cross-junction system with its thermal conductivity calculated by the Monte Carlo method NCJ_AGFMC Nano-cross-junction system with its thermal conductivity calculated by the AGFMC method AbstractTailoring thermal properties with nanostructured materials can be of vital importance for many applications. Generally classical phonon size effects are employed to reduce the thermal conductivity, where strong phonon scattering by nanostructured interfaces or boundaries can dramatically supress the heat conduction. When these boundaries or interfaces are arranged in a

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Thermoelectric Enhancement of Silicon Membranes by Ultrathin Amorphous Films

Cited by 28 publications

References 38 publications

Thermoelectric Energy Harvesters: A Review of Recent Developments in Materials and Devices for Different Potential Applications

Thermoelectric Energy Harvesters: A Review of Recent Developments in Materials and Devices for Different Potential Applications

Measurement of the phonon mean free path spectrum in silicon membranes at different temperatures using arrays of nanoslits

Phonon Transport within Periodic Porous Structures — From Classical Phonon Size Effects to Wave Effects

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