1967
DOI: 10.1016/0008-6223(67)90002-4
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Thermodynamische Betrachtungen zur Kohlenstoffabscheidung bei der pyrolyse Gasförmiger Kohlenstoffverbindungen

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Cited by 42 publications
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“…2,3) The CVD process is a growth method in which graphene is directly synthesized from carbon source gases, for example CH 4 , C 2 H 4 , and C 2 H 2 . The C-H bonding is too strong to be dissociated by only thermal energy, 4) so practicable graphene CVD methods can be divided into two types of CVD; one is the ''catalyst CVD'' using metal catalysts as the growth substrate, 2,3,[5][6][7][8][9] and the other is ''plasma-enhanced CVD''. 10,11) In particular, catalyst CVD is now widely used to obtain the large area and high quality graphene.…”
Section: Introductionmentioning
confidence: 99%
“…2,3) The CVD process is a growth method in which graphene is directly synthesized from carbon source gases, for example CH 4 , C 2 H 4 , and C 2 H 2 . The C-H bonding is too strong to be dissociated by only thermal energy, 4) so practicable graphene CVD methods can be divided into two types of CVD; one is the ''catalyst CVD'' using metal catalysts as the growth substrate, 2,3,[5][6][7][8][9] and the other is ''plasma-enhanced CVD''. 10,11) In particular, catalyst CVD is now widely used to obtain the large area and high quality graphene.…”
Section: Introductionmentioning
confidence: 99%
“…Graphene is an attractive two-dimensional material consisting of carbon atoms arranged in a hexagonal lattice. [1][2][3] Various formation methods for graphene, such as mechanical exfoliation, 4) thermal decomposition of silicon carbon, 5) and chemical vapor deposition, 6,7) have been widely investigated. However, these methods are unfavorable for providing large-area graphene uniformly and require post-treatment.…”
Section: Introductionmentioning
confidence: 99%