Thermal treatment effect on the optical properties of ZrO2 thin films deposited by thermionic vacuum arc

The structural, optical and morphological properties of CaF2 thin films by using Thermionic Vacuum Arc (TVA)

“…The TVA technique for depositing thin films utilizes a plasma discharge source which generates pure metal and non-metal plasma. The TVA discharge occurs between cathode and anode under high or ultra high vacuum conditions [17][18][19][20][21][22][23][24]. The cathode in the Wehnelt cylinder contains a heated tungsten filament which emits electrons and the anode contains the substrate material to be coated.…”

“…A steady state concentration of the evaporated atoms of anode materials is established quickly in the medium between the anode and the cathode. With further increase in the accelerating dc voltage, a bright thermionic vacuum arc occurs in the vacuum chamber due to the vaporized atoms of the anode material [17][18][19][20][21][22][23][24]. Under the suitable pressure in the vacuum chamber, the generated plasma material deposited on the substrate forms a thin film.…”

Comparison of Five-Layered ZrO2 and Single-Layered Ce, Eu, and Dy-Doped ZrO2 Thin Films Prepared by Sol-Gel Spin Coating Method

“…Zirconium oxide (ZrO 2 ) is useful for technological applications due to its high refractive index, high transparency in the visible and near-infrared regions, high dielectric constant, high-energy band gap, high density, high hardness, high electrical conductivity, strong wear resistance, high fracture toughness, low thermal conductivity and extreme chemical inertness [1][2][3][4][5][6][7]. Zirconium oxide has found use in many diverse applications, including catalysis, surface supports, laser systems, gate dielectrics, optical and electronic devices, magnetic recording disks, and biomedical and prosthetic coatings [8][9][10][11].…”

“…Many oxide materials have been used extensively in the form of the thin films [2]. In thin film fabrication technology, many different types of methods are used, such as electron beam evaporation [13], metal-organic chemical vapor deposition [2], atomic layer deposition [14], RF magnetron sputtering [15], thermionic vacuum arc deposition [16], pulsed laser deposition [3] and sol-gel method [17][18][19].…”

Characteristic Properties of Dy-Eu-Ce Co-Doped ZrO2Nanofibers Fabricated via Electrospinning

“…Zirconium oxide (ZrO 2 ) is one of the most attractive oxide materials, which are used in many applications such as catalysis, luminescent materials, surface supports, laser systems, gate dielectrics, optical and electronic devices, magnetic recording disk, biomedical and prosthetic coatings [1][2][3][4], due to their desirable properties, such as high refractive index, high transparency in the visible and near-infrared region, high dielectric constants, high-energy band gap, high density, hardness, electrical conductivity, wear resistance, high fracture toughness, low thermal conductivity and extreme chemical inertness [5][6][7][8]. Researchers have used different ways for the fabrication of the ZrO 2 doped with different materials.…”