Comparison of Five-Layered ZrO₂ and Single-Layered Ce, Eu, and Dy-Doped ZrO₂ Thin Films Prepared by Sol-Gel Spin Coating Method

Abstract

In order to investigate the influence of the number of layers on the properties of ZrO2 thin films, we prepared one pure ZrO2 film sample with five layers and Ce, Eu, and Dy-doped ZrO2 samples with single layer, by spincoating sol gel-method. The crystal structures of thin films were determined using X-ray diffraction, morphology of the samples was analyzed by scanning electron microscopy, and the optical properties of the samples were determined by ultraviolet/visible absorbance measurements. The results of these measurements have shown that the concentration of the dopants and the thickness of thin film layers play a vital role in the physical, chemical, and optical properties of the pure and doped ZrO2 thin films.

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