Thermal simulation of surface micromachined polysilicon hot plates of low power consumption

Dumitrescu, Marius; Cobianu, C.; Lungu, Dan; Dascǎlu, D.; Pascu, Adrian; Kolev, Spas D.; Berg, Albert van den

doi:10.1016/s0924-4247(99)00042-4

Cited by 17 publications

(5 citation statements)

References 3 publications

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“…It is shown that these two effects have a different temperature dependency for different gasses. Techniques have been shown to create micromachined isolated hotplates that can be used to miniaturize and integrate these types of sensors on a chip [59][60][61].…”

Section: Metal-oxide Gas Sensorsmentioning

confidence: 99%

Ammonia sensors and their applications—a review

Timmer¹,

Olthuis²,

Berg³

2005

Sensors and Actuators B: Chemical

1,488

816

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Section: Metal-oxide Gas Sensorsmentioning

confidence: 99%

Ammonia sensors and their applications—a review

Timmer¹,

Olthuis²,

Berg³

2005

Sensors and Actuators B: Chemical

1,488

816

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“…This has been especially true for MEMS systems where function and reliability depend on temperature control. Examples of such devices include microthermal actuators [1]- [3], semiconductor gas sensors utilizing polysilicon microhot plates [4], [5], micropolymerase chain reaction (PCR) well arrays [6]- [8], micropower generation sources [9], [10], and heated atomic force microscope (AFM) cantilevers for data storage [11], [12]. With the exception of microPCR arrays, these thermal devices can exceed temperatures of 300 C and often contain critical features on the order of 10 m or less.…”

Section: Introductionmentioning

confidence: 99%

Thermal Metrology of Silicon Microstructures Using Raman Spectroscopy

Abel

Wright

King

et al. 2007

IEEE Trans. Comp. Packag. Technol.

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Thermal metrology of an electrically active silicon heated atomic force microscope cantilever and doped polysilicon microbeams was performed using Raman spectroscopy. The temperature dependence of the Stokes Raman peak location and the Stokes to anti-Stokes intensity ratio calibrated the measurements, and it was possible to assess both temperature and thermal stress behavior with resolution near 1 m. The devices can exceed 400 C with the required power depending upon thermal boundary conditions. Comparing the Stokes shift method to the intensity ratio technique, non-negligible errors in devices with mechanically fixed boundary conditions compared to freely standing structures arise due to thermally induced stress. Experimental values were compared with a finite element model, and were within 9% of the thermal response and 5% of the electrical response across the entire range measured.

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“…A FEM simulator is a useful tool to determine the thermal behaviour of these devices. So far, the main CAD packages used for this purpose are ANSYS [10,11], SESES [12], COSMOS [13], and SOLIDIS-ISE [14]. In this work, the silicon island thickness was optimized using the MEMCAD (4.8) FEM simulator from Microcosm Technologies, Inc. [15].…”

Section: Introductionmentioning

confidence: 99%

Thermal optimization of micro-hotplates that have a silicon island

Briand

Heimgartner²,

Grétillat³

et al. 2002

J. Micromech. Microeng.

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We have performed thermal measurements and electrothermal simulations (finite element modelling) with the aim of optimizing the power consumption and the temperature distribution of micro-hotplates for gas-sensing applications. A silicon island was added underneath the membrane of the micro-hotplate to improve the temperature distribution of drop-coated metal–oxide gas sensors and to thermally isolate MOSFET gas sensors. The temperature distribution over the sensing area and the power consumption depend on the silicon island thickness, which was optimized for both applications using the software MEMCAD from Microcosm Technologies. In the optimization process, we considered the thermal conductivity of silicon and dielectric membrane, the operating temperature, the geometry and the area of the heater, and the processing of the silicon island. The thickness of the silicon island was optimized to ensure a good temperature distribution over the gas-sensing area for metal–oxide and MOSFET gas sensors with specific geometry.

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Thermal simulation of surface micromachined polysilicon hot plates of low power consumption

Cited by 17 publications

References 3 publications

Ammonia sensors and their applications—a review

Ammonia sensors and their applications—a review

Thermal Metrology of Silicon Microstructures Using Raman Spectroscopy

Thermal optimization of micro-hotplates that have a silicon island

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