Elements of a systematic concept for test, characterization and analysis of thin film solar cells is discussed that is based on application and comparison of respective techniques in the world of micro‐ and nanoelectronic technologies, Starting with test and reliability issues, in depth electrical characterization like activation energy analysis from reverse dark currents, is presented. Analysis techniques that belong to the concept require electrically active devices and include all aspects of luminescence and stimulation. A key topic in electronic devices, Focused Ion Beam based Device or Circuit Edit, is also evaluated for application in thin film photovoltaics. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)